Molecular and Turbomolecular Pumps

Leiter, Frank

doi:10.1002/9783527688265.ch10

Cited by 2 publications

(2 citation statements)

References 18 publications

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“…Looking at the incoming particles (as an observer moving with the blades), the blade velocity 𝑢 will be vectorially added to the particle velocity c , which is the magnitude of the speed in equilibrium close to the most probable velocity. In the case where the velocities are approximately equal and/or the velocity ratio is roughly one, many particles pass through the blade channel from space 1 without touching the blades [12]. The particles that do touch the blade desorb according to the cosine law, and therefore, only a tiny fraction of particles enters Space 1 .…”

Section: Turbomolecular Pump Flow Characteristicsmentioning

confidence: 99%

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Modeling the Performance of a Single Rotor Row in a Turbomolecular Pump Using the TPMC Method: Effects of Operational and Geometric Variables

Sereshgi,

Ebrahimi

2024

Preprint

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Turbo-molecular pumps are widely used in industries and scientific studies in areas such as semiconductors and sedimentation. In; such pumps, the influence of the geometric characteristics and operating conditions on performance is of interest to researchers. A single-row rotor of a turbo-molecular pump was simulated, and the test particle Monte Carlo method was used to investigate the effects of blade spacing, angle, number, and length; as well as operating conditions on performance. The maximum compression ratio and pumping speed were calculated. The pump’s performance was studied for 12, 24, 36, and 48 blades in a single-row rotor at angles of 15, 20, and 30 degrees with a clearance of 0.015. We were increasing the gap from 0.015 to 0.025 and 0.035 examined across rotors with 12 to 48 blades, a blade speed ratio of 3.5, and a blade angle of 15 degrees. To validate the results, the numerical values obtained for 36 blades, 30-degree blade angle, and 0.015 clearance were compared to available experimental results, yielding good agreement. The results of this simulation are intended to cover cases of interest for design calculations.

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Section: Turbomolecular Pump Flow Characteristicsmentioning

confidence: 99%

“…1. Principle of turbomolecular pumps, distances between the blades t , blade angle  , blade width d , blade thickness w , and channel height h moves toward the right at velocity u [12] .…”

Section: Turbomolecular Pump Flow Characteristicsmentioning

confidence: 99%