1985
DOI: 10.1088/0034-4885/48/12/002
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Molecular beam epitaxy

Abstract: This article reviews the major physico-chemical aspects of molecular beam epitaxy (MBE), especially as applied to the deposition of thin epitaxial films of 111-V compound and alloy semiconductors. The experimental requirements to achieve the necessary levels of control, purity and uniformity are described first to establish the basic features of the technique. This is followed by a rather detailed treatment of the growth process, including thermodynamic considerations, surface reaction kinetics and film growth… Show more

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Cited by 204 publications
(57 citation statements)
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“…These discoveries have been facilitated by the use of advanced growth techniques such as molecular-beam epitaxy (MBE) , [14] pulsed laser deposition (PLD) , [15] chemical vapour deposition (CVD) [16] and atomic layer deposition (ALD) [17] that have made-possible the deposition of single crystalline thin films with atomic level precision.…”
Section: Introductionmentioning
confidence: 99%
“…These discoveries have been facilitated by the use of advanced growth techniques such as molecular-beam epitaxy (MBE) , [14] pulsed laser deposition (PLD) , [15] chemical vapour deposition (CVD) [16] and atomic layer deposition (ALD) [17] that have made-possible the deposition of single crystalline thin films with atomic level precision.…”
Section: Introductionmentioning
confidence: 99%
“…A standard example of this scenario is molecular-beam epitaxy (MBE) [1][2][3][4][5][6], wherein a crystalline film is formed on an underlying crystalline substrate as the result of the deposition of new material from a molecular beam. The simplest experimental realization of MBE is homoepitaxial growth, in which the substrate and film are the same material.…”
Section: Introductionmentioning
confidence: 99%
“…that is simply too large to fit into one article. The interested reader should refer to other reviews of this and other compound semiconductor surfaces that have been previously published [6][7][8][9][10][11][12][13].…”
Section: Introductionmentioning
confidence: 99%