CdSe,Te,.,/ZnSe quantum-dots structures have the large conduction and valence band offset at an appropriate composition and is expected to be a highly-efficient light-emitting material in green region. However, to our knowledge, there have been very few reports on CdSeTe epilayers [I]. Composition control of II-VIxVI.x mixed crystals is difficult because the vapor pressures of VIth elements are high. In this report, the gowth conditions were studied for controlling CdSeTe-epilayer composition.The substrates used were GaAs(100). Elemental Cd, Se and Te were used as source materials. The growth temperature was 300°C. X-ray diffraction measurement was performed to determine the composition of CdSexTe,., epilayers using Vegard's law. Reflection highenergy electron diffraction (RHEED) patterns were observed during growth.Several researchers succeeded the composition control of ZnSe,Te,., films by molecular beam epitaxy (MBE) [2,3]. Yao reported that the composition x is equal to the beam intensity ratio of Se to Zn (JS$Jzn) when the beam intensity of Te is larger than that of Se. This situation means that Se atoms are preferentially incorporated into ZnSeTe epilayers. This is due to larger heat of formation of ZnSe (39.0 kcalhol) than that of ZnTe (28.1 kcalhol) [4]. In case of MBE growth of CdSe,Te,.,, however, the composition x was not equal to the beam intensity ratio of Se to Cd (JsJJcJ when JTe is larger than J-, and also the composition I-x was not equal to the beam intensity ratio of Te to Cd (JTJJc,J when J,, is larger than J, . These results indicate that Se atoms (Te atoms in the latter case) are not preferentially incorporated into CdSeTe epilayers. The competition for incorporation of the Se and Te adatoms occurs on the growing surface.Turco-Sandroff reported that composition was controlled by growing ZnSeTe epilayers on the Zn-stabilized surface. Then, we grew CdSe,Te,., epilayers on the Cd-stabilized surface, which was confirmed by the ~(2x2) reconstruction patterns of RHEED. The composition x of the CdSe,Te,., epilayers could be well controlled by the beam intensity ratio of JS$(Js+JTe) as shown in Fig. 1. This situation is successfully explained by a simple growth model under following assumptions. (1) The two kinds of VIth impinging atoms on the IInd-atom-exposed surface are adsorbed at sticking probabilities of each atom. (2) No competition occurs for incorporation of two kinds of VIth atoms on the Cd-exposed surface. The ratio of the sticking probability of Se (b) to Te (kTJ was calculated to be 0.1 by the above-mentioned growth model. ks, is smaller than kTe because the vapor pressure of Se is very high and the heat of formation of CdSe (32.6 kcal/mol) is small compared to that of ZnSe.