“…In Figures and , the Si[Me]:L 23 VV AES of FSMSE and CSMSE are close to each other, and similar to that of Si(CH 3 ) 4 vapor. , However, the Si[X]:L 23 VV AES of FSMSE and CSMSE are totally different from each other. Furthermore, those are similar to the Si:L 23 VV AES of SiF 4 and SiCl 4 vapors, ,,, as mentioned in sections and . These observations of the Si[XR]:L 23 VV AES of FSMSE and CSMSE (XR = F, Cl, or Me) would also show that the site specificity is maintained up to the Auger electron emission even in CSMSE.…”