“…In the past years, molecular dynamics simulations on the vacancy use two and three-body form of Stillinger-Weber potential model [26] ; With the continuous development of the computer, there has been much closer to the embedded atom method (EAM) of the actual potential,that is many-body potential model [27] , as well as first-principles pseudopotential model [28]. Tomonori Kitashima with his partners [29] , use two and three-body form of Stillinger-Weber pair potential model to analyze vacancy diffusion in gallium arsenide.the study show that even at the melting point, there are still weak solid diffusion, and in the self-interstitial diffusion, the diffusion coefficient of arsenic atoms is larger than that of gallium atoms. Baskes [30] , using a more accessible and fix potential embedded atom method (MWAM) which including the angle of force, study on the simulated Mo / Si system and predict the lattice constant, elastic constants, vacancy formation energy, the phase interface stability.…”