2021
DOI: 10.3390/ma14102548
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Molecular Dynamics Investigation of the Deformation Mechanism of Gold with Variations in Mold Profiles during Nanoimprinting

Abstract: Understanding the deformation behavior during nanoimprint lithography is crucial for high resolution patterning. Molecular dynamics modeling was implemented to investigate the effect of different mold profiles (cylindrical, rectangular, and spherical) on the von Mises stress, lattice dislocations, and material deformation. Relatively higher von Mises stress (1.08 × 107 Pa) was observed for the spherical mold profile compared to the rectangular and cylindrical profiles due to the larger surface area of contact … Show more

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Cited by 15 publications
(6 citation statements)
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References 55 publications
(50 reference statements)
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“…The lithography technique is used to transfer the master pattern of the geometric shapes onto a surface of a substrate [ 133 , 134 , 135 , 136 , 137 , 138 , 139 , 140 ]. Photolithography is primarily used for pattern transfer due to its wide applicability in the field of microelectronics [ 141 ].…”
Section: Mn Manufacturing Methodsmentioning
confidence: 99%
“…The lithography technique is used to transfer the master pattern of the geometric shapes onto a surface of a substrate [ 133 , 134 , 135 , 136 , 137 , 138 , 139 , 140 ]. Photolithography is primarily used for pattern transfer due to its wide applicability in the field of microelectronics [ 141 ].…”
Section: Mn Manufacturing Methodsmentioning
confidence: 99%
“…ANN [91] Perovskite oxides ML analysis of perovskite oxides grown by molecular beam epitaxy. K means [92] CNT forest Using ML to predict carbon nanotube forest attributes DL, RFF [93] SrRuO 3 Utilized BO in molecular beam epitaxy BO [94] CsPbBr3 Utilized active learning algorithm to determine the optimal synthesis route Active learning algorithm [95] Nanocomposites Nanocomposites, heterogeneous materials with structures, components, or phases ranging from 1 to 100 nm, find applications in diverse fields, including food, biomedical [96][97][98][99], and electroanalysis [26,[100][101][102]. They offer a unique approach for enhancing properties through the integration of nanoscale reinforcements developed through material synthesis.…”
Section: Bo Dnn [89]mentioning
confidence: 99%
“…Nano-scale carbon pillars with controlled diameters, down to 25 nm, and protruded lengths of 100 nm were successfully used as a master-mold for UV-NIL [ 32 ]. Nanoimprint lithography (NIL) [ 33 , 34 , 35 , 36 , 37 ] is a versatile nanofabrication technique that can pattern nanoscale features with high fidelity resolution on a variety of substrates in combination with thin-film deposition processes [ 38 , 39 , 40 , 41 , 42 ]. Thus, it is a viable processing method to incorporate catalyst for the growth of CNTs with a high aspect ratio.…”
Section: Introductionmentioning
confidence: 99%