Molecular dynamics simulation on selective etching of α -quartz and amorphous quartz substrate using low-energy argon ion bombardment model in dry etching process

Manap, Abdul Haadi Abdul; Mohamed, Khairudin

doi:10.1117/1.jmm.14.3.033505

Cited by 2 publications

(3 citation statements)

References 22 publications

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“…Moreover, these methods are labor-intensive and time-consuming, rendering them impractical for large-scale production. To stimulate innovation and propel research in cell-nanotopography technology, it is essential to develop low-cost, highthroughput, and high-resolution nanolithography techniques nanolithography [74]. The rapid progress in the semiconductor industry has notably hastened the development of micro/nanofabrication techniques.…”

Section: Development In Nanotopography Fabricationmentioning

confidence: 99%

Development in Cell-Nanotopography Interaction Applications and Its Potential for Mass Production

Abdul Haadi Abdul Manap,

Mohd Syakirin Rusdi,

Siti Suhaila Md Izah

et al. 2024

IJNeaM

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Since the initial presentation of cell contact response with native topographic structure in 1911, numerous studies have been published to investigate how cells respond when interacting with micro/nano structures.. Many of the founding has potential to become applications in bio-medical or in pharmaceutical industry. Regardless of the huge prospect, these applications are still bound to the manufacturability of the micro/nano topographic structures. The introduction of nanoimprint lithography in 1995 has demonstrated that it can replicating micro/nano structures with relatively simple and low-cost equipment but with high throughput and high reliability. This paper reviews the development in cell-micro/nanotopographic interactions, the development of high throughput nanofabrication method. The nanofabrication methods in focus is nanoimprint lithography and electrospinning. This review paper also discusses the potential applications from cell-nanotopographic for mass productions. Prospectus applications such as the development in development of antimicrobial surfaces interactions and biologically inspired nanoscaffold and nanopattern suitable for tissue repair and regeneration are also discussed.

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Section: Development In Nanotopography Fabricationmentioning

confidence: 99%

Development in Cell-Nanotopography Interaction Applications and Its Potential for Mass Production

Abdul Haadi Abdul Manap,

Mohd Syakirin Rusdi,

Siti Suhaila Md Izah

et al. 2024

IJNeaM

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“…The MD method has helped engineers and scientists in complex problems relating to micro-electromechanical systems (MEMS) research. 10,11 In this study, MD was used to study the stress–strain relationship of PDMS nanostructures when subject to uniaxial stress.…”

Section: Introductionmentioning

confidence: 99%

“…Hence, this study has employed the molecular dynamics (MD) method to investigate the PDMS distortion nanostructure in the demolding process. The MD method has helped engineers and scientists in complex problems relating to micro-electromechanical systems (MEMS) research. , In this study, MD was used to study the stress–strain relationship of PDMS nanostructures when subject to uniaxial stress.…”

Section: Introductionmentioning

confidence: 99%

Molecular Dynamics Study of Poly(dimethylsiloxane) Nanostructure Distortion in a Soft Lithography Demolding Process

2019

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This study aims at investigating the distortion of poly(dimethylsiloxane) (PDMS) nanostructures in a soft lithography demolding process using molecular dynamics simulation. Experimental results show that after peeling, PDMS nanopillars became 10–60% longer in height than the mold size. Molecular dynamics simulations have been employed to plot the stress–strain curve of the nanopillars when subjected to uniaxial stress. Three force fields (COMPASS, CVFF, and PCFF) were used for modeling. The demolding process in soft lithography and nanoimprint lithography causes significant deformation in replication. The experimental results show clear signs of elongation after demolding. Molecular dynamics simulations are employed to study the stress–strain relationship of the PDMS nanopillars. The results from the simulation show that a PDMS nanopillar at temperature T = 300 K under tensile stress shows characteristics of flexible plastic under tensile stress and has a lower Young’s modulus, ultimate tensile stress, and Poisson’s ratio.

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Molecular dynamics simulation on selective etching of α -quartz and amorphous quartz substrate using low-energy argon ion bombardment model in dry etching process

Cited by 2 publications

References 22 publications

Development in Cell-Nanotopography Interaction Applications and Its Potential for Mass Production

Development in Cell-Nanotopography Interaction Applications and Its Potential for Mass Production

Molecular Dynamics Study of Poly(dimethylsiloxane) Nanostructure Distortion in a Soft Lithography Demolding Process

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