“…In particular, the iodate ion IO 3 À produces extremely high etch rates when ethanol is added to the etchant to avoid the precipitation of I 2 . However, the halogens are able to react thermally with Shih et al (1992Shih et al ( , 1993, McCord et al (1992), Kidder et al (1992), Dubbelday et al (1993), Steckl et al (1994, Chandler-Henderson et al (1994), Liu et al (1994, 2007, Kalem and Rosenbauer (1995), Anaple et al (1995), Amato (1995), Schoisswohl et al (1995), Jones et al (1995), , Di Francia and Citarella (1995), Winton et al (1996Winton et al ( , 1997 Kolasinski and Gogola (2012) Si and do so in a manner that destroys por-Si films. On the other hand, Xu and Adachi (Xu and Adachi 2006) investigated etching in KIO 3 + HF solutions.…”