“…The superiority of covalent bonding can be reflected by comparing with another popular candidate for MEMS/NEMS lubricant of Langmuir-Blodgett (LB) film, which attaches to the substrate via weak van der Waal force. As expected, SAMs is found to be much more stable against shear stress and possesses better wear resistance as compared with LB film with similar composition and structures (Bliznyuk et al, 1998;Bushan et al, 1995;DePalma & Tillman, 1989;Kim et al, 1999;Overney et al, 1992;Peach et al, 1996;b,Tsukruk et al, 1996;Tsukruk, 2001.). As shown in Fig.…”