2021
DOI: 10.3390/ma14113034
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Monitoring Carbon in Electron and Ion Beam Deposition within FIB-SEM

Abstract: It is well known that carbon present in scanning electron microscopes (SEM), Focused ion beam (FIB) systems and FIB-SEMs, causes imaging artefacts and influences the quality of TEM lamellae or structures fabricated in FIB-SEMs. The severity of such effects depends not only on the quantity of carbon present but also on its bonding state. Despite this, the presence of carbon and its bonding state is not regularly monitored in FIB-SEMs. Here we demonstrated that Secondary Electron Hyperspectral Imaging (SEHI) can… Show more

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Cited by 24 publications
(16 citation statements)
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References 44 publications
(66 reference statements)
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“…Figure 6D,E show the SE spectra (SES) generated. In previously published SEHI data, a SE Ti peak was identified at 4.9–5.3 eV, with Ti oxides found in a peak range of 5.5–6.2 eV 20 . Both of these peaks are apparent in all SES spectra collected.…”
Section: Resultsmentioning
confidence: 72%
See 1 more Smart Citation
“…Figure 6D,E show the SE spectra (SES) generated. In previously published SEHI data, a SE Ti peak was identified at 4.9–5.3 eV, with Ti oxides found in a peak range of 5.5–6.2 eV 20 . Both of these peaks are apparent in all SES spectra collected.…”
Section: Resultsmentioning
confidence: 72%
“…In previously published SEHI data, a SE Ti peak was identified at 4.9-5.3 eV, with Ti oxides found in a peak range of 5.5-6.2 eV. 20 Both of these peaks are apparent in all SES spectra collected. We can therefore confirm that Ti is still present on the surface of both explanted Ti-PP meshes.…”
Section: Sehi Is a Novel Highly Surface Sensitive Technique That Has ...mentioning
confidence: 80%
“…SEHI data collection and processing: The methodology of the application of SEHI has been published in depth previously [ 23 , 24 , 25 , 26 ]. Briefly, SE spectra generation was performed on PGS-M using the Helios FEI Helios G4 CX DualBeam microscope by applying consistent operating conditions of 1 kV and a 50 pA immersion mode.…”
Section: Methodsmentioning
confidence: 99%
“…Secondary electron hyperspectral imaging (SEHI) is a multiscale material characterisation technique applied within a scanning electron microscope (SEM). SEHI is based on the collection of secondary electron (SE) emission spectra [ 11 , 12 , 13 , 14 , 15 ] at low primary beam energies, making the technique applicable to the chemical inspection of uncoated polymer surfaces [ 4 , 16 , 17 , 18 , 19 , 20 , 21 , 22 ] as well as metals [ 23 ]. SE spectra for some hydrocarbon materials have been found to be influenced by the excitation of intramolecular vibrations [ 20 , 21 ].…”
Section: Introductionmentioning
confidence: 99%
“…The detection of C in all samples could be due to sources of contamination inherent to the instrument (e.g., small drops of oil from the vacuum pumps or remains of previous samples) or contamination resulting from the sample preparation and handling process (e.g., from sanding or from carbon tape used to adhere the sample). [43,44] 4 | CONCLUSIONS Cerium molybdate and aluminum molybdate were synthesized by precipitation at controlled pH. Both solids are partially soluble in aqueous NaCl solutions, thus providing two ionic species with aluminum corrosion inhibiting properties: the trivalent cations Ce(III) and Al(III), and molybdate anions.…”
Section: Acknowledgmentsmentioning
confidence: 99%