Monitoring error compensation in general optical coatings

Willey, Ronald R.

doi:10.1364/ao.48.004475

Cited by 4 publications

(1 citation statement)

References 12 publications

(27 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The present study reports on improvements in the industrial manufacture of beamsplitter and longpass edge filter coatings, when the traditionally applied (indi rect) quartz crystal monitoring technique is combined with broadband optical monitoring [17]. The advantages of combining single wavelength monitoring and quartz crystal monitoring have been demonstrated for several specifications [18][19][20].…”

Section: Introductionmentioning

confidence: 98%

Practical optimization of a coating deposition process by application of hybrid monitoring strategies in an industrial production environment

Held¹,

Wilbrandt

Stenzel

et al. 2012

Advanced Optical Technologies

View full text Add to dashboard Cite

The applicability of broadband optical monitoring to an industrial optical coating production environment is investigated. Different monitoring strategies have been applied to the deposition of beamsplitters and longpass edge filters by electron beam evaporation without any plasma or ion assistance. While the shift and reproducibility in the optical constants were poorly specified, pure optical broadband monitoring of the coatings did not prove superior to traditional quartz crystal monitoring. On the contrary, the introduction of a hybrid monitoring strategy that combines quartz crystal and broadband optical monitoring led to significant improvements in the coating performance reproducibility compared to a pure quartz crystal monitoring approach. Accompanying computational manufacturing experiments performed for the beamsplitter design reveal the same trend

show abstract

Section: Introductionmentioning

confidence: 98%

Practical optimization of a coating deposition process by application of hybrid monitoring strategies in an industrial production environment

Held¹,

Wilbrandt

Stenzel

et al. 2012

Advanced Optical Technologies

View full text Add to dashboard Cite

show abstract

From independent thickness monitoring to adaptive manufacturing: advanced deposition control of complex optical coatings

et al. 2011

View full text Add to dashboard Cite

Postanalyses of an optical multilayer interference filter using numerical reverse synthesis and Rutherford backscattering spectrometry

et al. 2013

View full text Add to dashboard Cite

Post nondestructive analyses of an all-dielectric multilayer Fabry-Perot interference filter developed through a reactive electron beam deposition process have been carried out through numerical reverse engineering of transmission spectra, Rutherford backscattering spectroscopy and quartz crystal monitoring data to derive multilayer geometry, deposited layer thicknesses, densities, refractive indices, compositions, and stoichiometry. These techniques are collectively used to fulfill the missing links with complementary and some supplementary information to inverse synthesize the multilayer geometry. During this investigation it is distinctly understood that the factors associated with real-time deposition have significantly influenced the microscopic parameters, namely, the densities and refractive indices of TiO2 and SiO2 layers. This in turn influenced the layers' geometric (physical) thicknesses during automated quarter-wave optical layer monitoring and consequently affected the experimental spectral characteristics. The role of oxygen has been observed to be significant in controlling the mass densities of these refractory oxide layers. It is further noticed that the layer density values have been significantly perturbed whether the associated TiO2 or SiO2 oxide dielectric films are substoichiometric (oxygen-deficient), stoichiometric, or superstoichiometric (oxygen-enriched).

show abstract

Monitoring error compensation in general optical coatings

Cited by 4 publications

References 12 publications

Practical optimization of a coating deposition process by application of hybrid monitoring strategies in an industrial production environment

Practical optimization of a coating deposition process by application of hybrid monitoring strategies in an industrial production environment

From independent thickness monitoring to adaptive manufacturing: advanced deposition control of complex optical coatings

Postanalyses of an optical multilayer interference filter using numerical reverse synthesis and Rutherford backscattering spectrometry

Contact Info

Product

Resources

About