Monitoring of Nanoscale Particles in Cleanrooms: ISO 14644-12

Abstract

The Journal of the IEST presents the second in a series of outreach articles by ISO/TC 209 leaders to foster promotion and education of the expanding body of ISO/TC 209 Standards

Integrated microfluidic-based ultrafine water condensation particle counter (UWCPC) for monitoring of airborne nanoparticle generation and growth mechanisms

“…21 A condensation particle counter (CPC) is a widely employed device for measuring nanoparticle concentrations in diverse environments, including atmospheric research, industrial hygiene, and cleanroom monitoring. [22][23][24] The primary reason for the widespread use of CPCs in nanoparticle measurements is their exceptional accuracy. CPCs operate by creating a controlled environment in which air is in a supersaturated state, causing the nanoparticles to condense and form micron-sized droplets.…”

Condensation Particle Counters: Exploring the Limits of Miniaturisation

“…Once grown by condensation, the particles are then individually counted by coupled optical diagnostics. This technology is incredibly robust with high sensitivity, precision and accuracy and is the regulatory mandated sensor in clean rooms, EU vehicle emissions regulations and air quality directives (Dixon Heathman & Ensor, 2019;European Commission, 2012). Modern CPC technology dates to the 1970s when Bricard, Delattre, Madelaine, and Pourprix (1976) and Sinclair and Hoopes (1975) introduced initial continuous laminar flow CPC designs using alcohol as a working fluid.…”