Monolithic fabrication of three-dimensional microfluidic networks for constructing cell culture array with an integrated combinatorial mixer

Liu, Mike C.; Ho, Dean; Tai, Yu‐Chong

doi:10.1016/j.snb.2007.09.074

Cited by 40 publications

(33 citation statements)

References 24 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Among conventional microfabrication processes, the chemical vapor deposition (CVD) process using parylene and the microthermoforming process can be employed. Although the CVD process using parylene is used to fabricate 3-D membrane microstructures (Zhenga et al, 2007;Liua et al, 2008), the limitations caused by the unavailability of suitable materials and low production rates present significant problems. The microthermoforming process (Truckenmüller et al, 2002;Giselbrecht et al, 2006) can be applied to a wide variety of thermoplastic materials and is suitable for mass production; however, it cannot be applied to highly porous membranes because the pressurized fluid leaks through the pores.…”

Section: Membrane Micro Emboss (Meme) Processmentioning

confidence: 99%

Membrane Micro Emboss (MeME) Process for 3-D Membrane Microdevice

Ikeuchi¹,

Ikuta²

2009

Micro Electronic and Mechanical Systems

View full text Add to dashboard Cite

Section: Membrane Micro Emboss (Meme) Processmentioning

confidence: 99%

Membrane Micro Emboss (MeME) Process for 3-D Membrane Microdevice

Ikeuchi¹,

Ikuta²

2009

Micro Electronic and Mechanical Systems

View full text Add to dashboard Cite

“…They are required for developing micro-fluidic devices such as reactors, mixers, ejectors, cell selectors, and others [11][12][13][14]. The patterning is also required for developing optical micro-components such as lens and prism arrays, and others [15][16][17][18][19].…”

Section: Introductionmentioning

confidence: 99%

Improvement of Patterning Homogeneity in a Field of Projection Exposure System Using a Gradient-Index Lens Array

Horiuchi

Sato

Kobayashi

2017

J. Photopol. Sci. Technol.

View full text Add to dashboard Cite

Pattern width homogeneity in an exposure field of gradient-index (GRIN) lens array was greatly improved by changing the sub-scan method for averaging the pattern widths. By investigating the pattern width distribution in the exposure field, it was clarified that the parts, where the printed patterns were degraded and pattern widths were notably changed, appeared as striped lines. It was supposed that the striped abnormal pattern-width change was caused by the extra exposures for the times when the sub-scan stage was stopped at both the sub-scan ends for turning the scan direction. For this reason, sub-scan length was vastly extended, and the sub-scan stage was turned at the both ends after all the patterns on a reticle passed over the actually used parts of a GRIN lens array. By this method, no patterns were exposed and projected on a wafer while the sub-scan stage was stopped for turning at the both ends. As a result, 15-µm L&S patterns were almost homogeneously printed in the exposure field within a variation range of ±6%.

show abstract

“…In recent years, the three-dimensional microfluidic devices have been actively studied in varieties of fields such as electric, biological, and medical industries [1][2][3][4][5][6]. For extension to the threedimensional, the micro channel and tube applications are recognized as the important key technologies.…”

Section: Introductionmentioning

confidence: 99%

Three-Dimensional Analysis of Liquid Propagation at Microchannel Junction using ESEM

Yagi

Kawai

2017

J. Photopol. Sci. Technol.

View full text Add to dashboard Cite

The three-dimensional wetting phenomena in a T-shaped microchannel made of a SU-8 photoresist accompanying with a pillar sub-pattern are analyzed by using an environmental scanning electron microscopy (ESEM). By lowering the sample temperature in the ESEM chamber at constant the H 2 O pressure, the water condensation occurs under H 2 O dew point and the liquid propagation in the microchannel can be observed. The experimental results show that the pinning angle of water flow at T-junction is 58 degrees in the T-shaped microchannel. In the case of the T-shaped microchannel with the sub-pattern, it is found that the pinning angle becomes low by adhering the water around the sub-pattern. These results can realize to the smooth flow at the channel junction without any water trapping for the three-dimensional microfluidic devices.

show abstract

Monolithic fabrication of three-dimensional microfluidic networks for constructing cell culture array with an integrated combinatorial mixer

Cited by 40 publications

References 24 publications

Membrane Micro Emboss (MeME) Process for 3-D Membrane Microdevice

Membrane Micro Emboss (MeME) Process for 3-D Membrane Microdevice

Improvement of Patterning Homogeneity in a Field of Projection Exposure System Using a Gradient-Index Lens Array

Three-Dimensional Analysis of Liquid Propagation at Microchannel Junction using ESEM

Contact Info

Product

Resources

About