Monolithic integrated MEMS phased array antenna scanning in two dimensions

Abstract

A two-dimension scanning of phased array antenna has been presented. Aperture coupled microstrip patch antenna (ACMPA) elements are used to form a 2 × 2 array operating at 20 GHz. The array is monolithically fabricated with RF MEMS switches by using surface micromachining and anodic bonding process. The main beam can steer in two dimensions when the phase shifters are on the different state. The measurement results show that the array can complete a beam steering angle of approximate ²30°i n both E-plane and H-plane, and the highest gain is 9.5 dB.