2021
DOI: 10.1021/acsnano.1c01042
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Monolithic Integration of Vertical Thin-Film Transistors in Nanopores for Charge Sensing of Single Biomolecules

Abstract: We propose and fabricate solid-state nanopore devices that monolithically integrate solution-gated, vertical thin-film transistors (TFTs) inside the nanopores for charge-based sensing of translocating biomolecules. The TFTs consist of zinc oxide semiconductor channels and aluminum oxide gate dielectrics, which are both conformally deposited along the inner surfaces of the nanopores via atomic layer deposition. The resultant TFT channel lengths and nanopore diameters both reach the ∼10 nm range. In translocatio… Show more

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Cited by 16 publications
(16 citation statements)
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“…To fully exploit this result, it is necessary to utilise alternative sensing mechanisms to ionic current based detection that do not require individual nanopores to be fluidically isolated for their signal to be read out independently. Such alternative readout mechanisms often rely on integrating on-chip nanostructures such as fieldeffect sensors [18][19][20][21][22], tunnelling nanogaps [23][24][25][26], plasmonic nanostructures [57,58], and radiofrequency antennas [59] with a nanopore. To address this, we extended our CBD strategy to fabricate nanopores that are self-aligned with on-chip nanoelectrodes.…”
Section: Self-aligning Nanopores With An On-chip Metal Nanoconstrictionmentioning
confidence: 99%
See 1 more Smart Citation
“…To fully exploit this result, it is necessary to utilise alternative sensing mechanisms to ionic current based detection that do not require individual nanopores to be fluidically isolated for their signal to be read out independently. Such alternative readout mechanisms often rely on integrating on-chip nanostructures such as fieldeffect sensors [18][19][20][21][22], tunnelling nanogaps [23][24][25][26], plasmonic nanostructures [57,58], and radiofrequency antennas [59] with a nanopore. To address this, we extended our CBD strategy to fabricate nanopores that are self-aligned with on-chip nanoelectrodes.…”
Section: Self-aligning Nanopores With An On-chip Metal Nanoconstrictionmentioning
confidence: 99%
“…In particular, electrodes embedded within, or in close proximity to a nanopore can be used to control the translocation dynamics of biomolecules [13][14][15][16] or enable dielectrophoretic concentrating of analytes at the nanopore opening [17]. Solid-state nanopores have also been integrated with field-effect sensors [18][19][20][21][22] and tunnelling nanogap electrodes [23][24][25][26][27]. Measuring the conduction through such nanoelectrodes provides an alternative readout mechanism to ionic current based detection.…”
Section: Introductionmentioning
confidence: 99%
“…To fully exploit this result, it is necessary to utilise alternative sensing mechanisms to ionic current based detection that do not require individual nanopores to be fluidically isolated for their signal to be read out independently. Such alternative readout mechanisms often rely on integrating on-chip nanostructures such as field-effect sensors [18][19][20][21][22] , tunnelling nanogaps [23][24][25][26] , plasmonic nanostructures 54,55 , and radiofrequency antennas 56 with a nanopore. To address this, we extended our CBD strategy to fabricate nanopores that are self-aligned with on-chip nanoelectrodes.…”
Section: Self-aligning Nanopores With An On-chip Metal Nanoconstrictionmentioning
confidence: 99%
“…In particular, electrodes embedded within, or in close proximity to a nanopore can be used to control the translocation dynamics of biomolecules [13][14][15][16] or enable dielectrophoretic concentrating of analytes at the nanopore opening 17 . Solid-state nanopores have also been integrated with field-effect sensors [18][19][20][21][22] and tunnelling nanogap electrodes [23][24][25][26][27] . Measuring the conduction through such nanoelectrodes provides an alternative readout mechanism to ionic current based detection.…”
mentioning
confidence: 99%
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