2019
DOI: 10.1063/1.5053599
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Monolithic on-chip mid-IR methane gas sensor with waveguide-integrated detector

Abstract: We demonstrate a monolithic waveguide sensor integrated with a detector on-chip for mid-infrared absorption spectroscopic sensing. The optical sensing element comprises a chalcogenide glass spiral waveguide, and the detector is a PbTe photoconductor integrated directly with the chalcogenide waveguide. The limit of detection of the sensor for methane gas was experimentally assessed to be 1% by volume. Further optimization of the fabrication process and normalization of the laser power fluctuations should result… Show more

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Cited by 87 publications
(64 citation statements)
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“…k Integrated thermal emitter as light source (Reproduced with permission from [163]). l Chalcogenide waveguide sensor integrated with PbTe photodetector (Reproduced with permission from [164])…”
Section: Sensor Configurations and System Integrationmentioning
confidence: 99%
“…k Integrated thermal emitter as light source (Reproduced with permission from [163]). l Chalcogenide waveguide sensor integrated with PbTe photodetector (Reproduced with permission from [164])…”
Section: Sensor Configurations and System Integrationmentioning
confidence: 99%
“…Gas sensors with miniaturized size, ultrahigh sensitivity, and fast response time remain a challenge hindered by the small size and the weak absorption of gas molecules. Leveraging resonant SEIRA in metamaterials, optical interaction length for the same detection resolution can be reduced by 1000 times compared to spiral waveguide and free space nondispersive infrared (NDIR) gas sensor . To further improve the detection limit of metamaterial gas sensors, different enrichment layers, such as graphene, metal‐organic framework (MOF), polyethylenimine (PEI) are used to trap gas molecules into metamaterial hotspots in order to locally enhance near‐field interaction.…”
Section: Metamaterials In Chemical Sensing Applicationsmentioning
confidence: 99%
“…Only recently an integrated circuit containing the gas sensing waveguide and an on-chip detector has been demonstrated [19]. However, to our knowledge, a fully integrated MIR gas sensor, including light source and detector, has not yet been demonstrated.…”
Section: Mid-wavelength Infrared (Mir)mentioning
confidence: 99%
“…This paper reviews how the maturity of the current PIC technology can be used to create powerful optical gas sensors. This is an active field of research, and first publications show the potential of this approach [17][18][19]. The research interest is also reflected in the number of scientific publications.…”
Section: Introductionmentioning
confidence: 99%