Monolithic silicon-on-nothing photonic crystal pressure sensor

Wong, Yu-Po; Bregman, J.; Solgaard, Olav

doi:10.1109/transducers.2017.7994454

Cited by 10 publications

(8 citation statements)

References 6 publications

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“…Figure 2 shows how under-etching and selective removal of passivation layers can extend the design space by de-coupling the diaphragm and void thickness. The process (GSON) is a combination of the GOPhER process [10] and ESS/SON [11].…”

Section: Gson Processmentioning

confidence: 99%

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Extended Design Space of Silicon-on-Nothing MEMS

Wong

Lorenzo

Miao

et al. 2019

J. Microelectromech. Syst.

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Complex monolithic Si MEMS can be created using a single mask by extending the empty-space-in-silicon (ESS) or silicon-on-nothing (SON) technology. The fabrication combines isotropic and anisotropic etching with selective removal of passivation layers followed by hydrogen annealing. The resulting expanded design space includes multilayer structures and embedded cavities. The MEMS formation by the hydrogen annealing is simulated both at large scales and microscopic scales that together predict the shape of the finished MEMS. We demonstrate the accuracy of our process and simulations by fabricating single-and double-layer evacuated silicon voids that form Fabry-Perot optical pressure sensors with the sealed voids as pressure references. We also create multi-layered sensors with an integrated photonic crystals sensing diaphragm for improved optical readout. The sensors have a calculated 6.7 µV/Pa sensitivity and low noise over a dynamic range of over 70.9 kPa.

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Section: Gson Processmentioning

confidence: 99%

“…To demonstrate the capability of GSON to create multiple-layers of MEMS structures, we fabricated absolute pressure sensors with integrated photonic crystal (PC) mirrors, following the process described in Fig. 3 [11]. The macroscopic annealing simulation of this device is shown in Fig.…”

Section: Sensor Design Fabrication and Characterizationmentioning

confidence: 99%

Extended Design Space of Silicon-on-Nothing MEMS

Wong

Lorenzo

Miao

et al. 2019

J. Microelectromech. Syst.

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“…A point defect embedded in the PC structure, that acts as a micro-cavity, can trap the light. So far, a few PC-based structures have been suggested for strain/stress [12][13][14][15], and pressure sensor [16][17][18][19][20][21][22][23][24].…”

Section: Introductionmentioning

confidence: 99%

“…In 2016, Tao et al [22] proposed a 2D PC pressure sensor that consists of two PC quasi waveguides and an optimized nanocavity that is placed in between the two quasi waveguides. In 2017, Wong et al [23] realized and simulated (using FEM analysis and also rigorous coupled-wave analysis) a pressure sensor using PC mirror pressure-sensing diaphragms with silicon-on-nothing (SON) reference cavities. In 2021, Mishra et al [24] proposed a 1D indium arsenide (InAs) PC-waveguide-based pressure sensor with respect to the output transmitted intensity in 3-communication windows.…”

Section: Introductionmentioning

confidence: 99%

A New Design of Pressure Sensor Based on a GaAs-based Two Dimensional Photonic Crystal Slab on SiO2 Substrate

Norouzi

Fasihi

2021

Preprint

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This paper reports the design and three dimensional (3D) simulation of a new photonic crystal (PC) pressure sensor. The device is constructed using a GaAs-based 2D PC slab on SiO2 substrate. The strain/stress simulations and also the spectral simulations are done using CST Studio Suite. In this investigation, the sensitivity of the proposed pressure sensor is calculated by considering the variation of the refractive index and also the deformation of the structure. The numerical results show that when pressure is applied, the refractive index variations cause an increment in the resonant wavelength of the transmission spectrum, but the deformation factor cause a decrease in the resonant wavelength. It has been shown that the relationship between the applied pressure and the resonant wavelength of the designed micro-cavity is linear. Based on the simulation results, the quality factor of the designed micro-cavity and the sensitivity of the pressure sensor are 2200 and 3.5 nm / GPa, respectively.

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“…The novel fabrication process enables simple manufacturing of multiscale (micro to nano) cavities without hermetical sealing process. Due to such unique advantages, SON and GON structures are adopted in various applications [8][9][10][11][12][13][14] . These applications are widely sorted into two categories: devices which exploit the cavity itself and others which value its peripherals.…”

Section: Introductionmentioning

confidence: 99%

PCA-Based Analysis Applied to Germanium-On-Nothing: Revealing Buried Sub-Surface Structures and Analyzing Defects From Nanoscale Surface Topography

Jeong

Kim

Lee

et al. 2021

Preprint

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Empty Space in Germanium (ESG) or Germanium-on-Nothing (GON) are unique self-assembled germanium structures with multiscale cavities of various morphologies. Due to their simple fabrication process and high-quality crystallinity after self-assembly, they can be applied in various fields including micro-/nanoelectronics, optoelectronics, and precision sensors, to name a few. In contrast to their simple fabrication, inspection is intrinsically difficult due to buried structures. Today, ultrasonic atomic force microscopy and interferometry are some prevalent non-destructive 3-D imaging methods that are used to inspect the underlying ESG structures. However, these non-destructive characterization methods suffer from low throughput due to slow measurement speed and limited measurable thickness. To overcome these limitations, this work proposes a new methodology to construct a principal-component-analysis based database that correlates surface images with empirically determined sub-surface structures by interpolating the surface topography from the database and determining the buried sub-surface structure. Since the acquisition rate of a single nanoscale surface micrograph is up to a few orders faster than a thorough 3D sub-surface analysis, the proposed methodology would provide an exploitable and decisive advantage over the currently prevalent methods. Also, an empirical destructive test essentially resolves the measurable thickness limitation. We also demonstrate the practicality of the proposed methodology by applying it to GON devices to selectively detect and quantitatively analyze surface defects. Compared to state-of-the-art deep learning-based defect detection schemes, our method is much effortlessly finetunable for specific applications. In terms of sub-surface analysis, this work proposes a fast, robust, and high-resolution methodology which could potentially replace the conventional exhaustive sub-surface inspection schemes.

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Monolithic silicon-on-nothing photonic crystal pressure sensor

Cited by 10 publications

References 6 publications

Extended Design Space of Silicon-on-Nothing MEMS

Extended Design Space of Silicon-on-Nothing MEMS

A New Design of Pressure Sensor Based on a GaAs-based Two Dimensional Photonic Crystal Slab on SiO2 Substrate

PCA-Based Analysis Applied to Germanium-On-Nothing: Revealing Buried Sub-Surface Structures and Analyzing Defects From Nanoscale Surface Topography

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