Monolithically Integrated CMOS-SMR Oscillator in 65 nm CMOS Using Custom MPW Die-Level Fabrication Process

Edrees, Hassan; Colon-Berrios, Aida R.; Godoy, Daniel de; Shepard, Kenneth L.; Kinget, Peter R.; Kymissis, Ioannis

doi:10.1109/jmems.2017.2691585

Cited by 11 publications

(5 citation statements)

References 36 publications

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“…Compatibility with CMOS as well as fabrication complexity and yield are necessary considerations for commercial applications. 28 Sources of Error. Error in gravimetric sensing can be grouped into two categories: error in the sensing mechanism and noise from the device and underlying electronics.…”

Section: ■ General Approachmentioning

confidence: 99%

“…Using thin piezoelectric films, many MEMS devices have resonant frequencies in the MHz to GHz range which leads to high sensitivities. , In addition to high sensitivity, bulk acoustic wave resonators (BAWs) have shown responses to mass changes as low as zeptograms . These devices can also operate at room temperature and can be integrated with CMOS technology. − While chemiresistor devices can incorporate inherently selective materials, mass sensors usually need a selective material, or sensitizer, to sense a specific analyte. Due to these sensitizers, it has been suggested that gravimetric sensors are not suited to high concentration environments .…”

Section: General Approachmentioning

confidence: 99%

“…The resonant frequency of a high quality factor resonator will be easier to track and injects less noise, and is therefore easier to implement. Compatibility with CMOS as well as fabrication complexity and yield are necessary considerations for commercial applications …”

Section: General Approachmentioning

confidence: 99%

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Review of Gravimetric Sensing of Volatile Organic Compounds

2020

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Volatile organic compounds (VOCs) are pervasive in the environment. Since the early 1980s, substantial work has examined the detection of these materials, as they can indicate environmental changes that can affect human health. VOCs and similar compounds present a very specific sensing problem in that they are not reactive and often nonpolar, so it is difficult to find materials that selectively bind or adsorb them. A number of techniques are applied to vapor sensing. High resolution molecular separation approaches such as gas chromatography and mass spectrometry are well-characterized and offer high sensitivity, but are difficult to implement in portable, real-time monitors, whereas approaches such as chemiresistors are promising, but still in development. Gravimetric approaches, in which the mass of an adsorbed vapor is directly measured, have several potential advantages over other techniques but have so far lagged behind other approaches in performance and market penetration. This review aims to offer a comprehensive background on gravimetric sensing including underlying resonators and sensitizers, as well as a picture of applications and commercialization in the field.

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Section: ■ General Approachmentioning

confidence: 99%

Section: General Approachmentioning

confidence: 99%

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Review of Gravimetric Sensing of Volatile Organic Compounds

2020

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“…LN exhibits extremely large k , 2 eff which strong depends upon the orientation of the crystal. 29) Here 108°YX LN is chosen as the piezoelectric layer giving k 2 eff (>39%). The LN X-axis is directed to the x-axis in Fig.…”

Section: Bpm Operation In Free Standing Tsbarmentioning

confidence: 99%

Application of free side edges to thickness shear bulk acoustic resonator on lithium niobate for suppression of transverse resonances

Wong

et al. 2021

Jpn. J. Appl. Phys.

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This paper discusses the applicability of free side edges to a thickness shear bulk acoustic resonators (TSBARs) on a rotated Y-cut lithium niobate plate for suppression of lateral energy leakage and the transverse mode resonances. It is shown both theoretically and experimentally that free edges are effective to suppress lateral leakage and transverse mode resonances in free-standing TSBARs. Although this technique is applicable only to the X side boundaries, it is shown that the Y′ side perpendicular to the X side can be designed for the piston mode operation independently by the simple two-dimensional analysis ignoring wave propagation toward the X direction. Then the discussion is extended to the solidly-mounted TSBAR. It is shown that this technique works well also for this case, and removal of the first few Bragg layers is enough for the transverse mode suppression.

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“…The Bragg reflector is composed of alternating layers with high and low acoustic impedance, offering acoustic isolation at the SMR resonant frequency as well as better mechanical support compared to the air-gap structure. [7] Current SMRs are widely used as RF filters, [8,9] oscillators, [10,11] actuators, [12][13][14] or sensors. [15][16][17] However, they can hardly meet the requirements of high operating frequencies, high sensitivity, wide bandwidth, and high-quality coefficient (Q) of 5/6G communications.…”

Section: Introductionmentioning

confidence: 99%

Solidly Mounted Resonators with Ultra‐High Operating Frequencies Based on 3R‐MoS₂ Atomic Flakes

Yang

Sun

Cai

et al. 2023

Adv Funct Materials

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Conventional bulk and thin piezoelectric materials based film bulk acoustic resonators (FBARs) are facing an insurmountable challenge for millimetric frequency applications due to the poor piezoelectric properties of the materials when their thickness reaches the sub-micron regime. Novel FBARs for ultra-high working frequencies are in urgent demand to meet the requirements of the fast-growing 5/6G telecommunication techniques. Recent advances in 2D piezoelectric nanomaterials create an opportunity in this perspective. Here, the first FBAR chip based on 2D 3R-MoS 2 ultrathin piezoelectric flakes with a solidly mounted resonator (SMR) architecture is reported. The typical resonant frequency for an SMR device based on ≈200 nm 3R-MoS 2 flake reaches over 25 GHz with high reproducibility. Theoretical and finite element analysis suggest that the observed resonance is of longitudinal acoustic modes. This study demonstrates for the first time that the access to 2D piezoelectric nanomaterials makes high performance piezoelectric devices feasible for various promising applications including high-speed telecommunication, acousto-optic, and sensor fields,etc.

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Monolithically Integrated CMOS-SMR Oscillator in 65 nm CMOS Using Custom MPW Die-Level Fabrication Process

Cited by 11 publications

References 36 publications

Review of Gravimetric Sensing of Volatile Organic Compounds

Review of Gravimetric Sensing of Volatile Organic Compounds

Application of free side edges to thickness shear bulk acoustic resonator on lithium niobate for suppression of transverse resonances

Solidly Mounted Resonators with Ultra‐High Operating Frequencies Based on 3R‐MoS₂ Atomic Flakes

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Monolithically Integrated CMOS-SMR Oscillator in 65 nm CMOS Using Custom MPW Die-Level Fabrication Process

Cited by 11 publications

References 36 publications

Review of Gravimetric Sensing of Volatile Organic Compounds

Review of Gravimetric Sensing of Volatile Organic Compounds

Application of free side edges to thickness shear bulk acoustic resonator on lithium niobate for suppression of transverse resonances

Solidly Mounted Resonators with Ultra‐High Operating Frequencies Based on 3R‐MoS2 Atomic Flakes

Contact Info

Product

Resources

About

Solidly Mounted Resonators with Ultra‐High Operating Frequencies Based on 3R‐MoS₂ Atomic Flakes