2004
DOI: 10.1016/j.sse.2004.05.034
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Monolithically integrated Si/SiGe resonant interband tunnel diode/CMOS demonstrating low voltage MOBILE operation

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Cited by 44 publications
(15 citation statements)
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“…The mainstream ULSI technology is still dominated by the CMOS or BiCMOS process at present. The developments of Si/SiGe-based resonant interband tunneling diodes (RITD) have shown great potential for integrating with the CMOS technology [10,11]. But they still require the low-temperature MBE system to achieve the whole application.…”
Section: Introductionmentioning
confidence: 99%
“…The mainstream ULSI technology is still dominated by the CMOS or BiCMOS process at present. The developments of Si/SiGe-based resonant interband tunneling diodes (RITD) have shown great potential for integrating with the CMOS technology [10,11]. But they still require the low-temperature MBE system to achieve the whole application.…”
Section: Introductionmentioning
confidence: 99%
“…The RTD basically consists of one or multiple quantum wells and can be fabricated using an advanced epitaxy growth technique such as molecular-beam epitaxy (MBE), which is not easily to Manuscript [7], [8]. But they still require the MBE system to accomplish the whole application.…”
Section: Introductionmentioning
confidence: 99%
“…However the main stream of the ULSI is still the Si-based CMOS or SiGe-based BiCMOS process at present. Some researchers have proposed the Si/SiGe RTD and resonant interband tunneling diodes (RITD) constructed by the strained layer and quantum-well mechanical tunneling structure [7][8][9]. Although the devices are based on Si/SiGe material, the fabrication process still requires the CVD or MBE system.…”
Section: Introductionmentioning
confidence: 99%