Monte Carlo calculations on electron multiple scattering in amorphous or polycrystalline targets

Soum, G.; Arnal, F.; Balladore, J.L.; Jouffrey, B.; Verdier, Peter H.

doi:10.1016/s0304-3991(79)80022-4

Cited by 20 publications

(22 citation statements)

References 27 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…This formula is more complex than the one of Soum et al (1979), but we have noticed that their equation does not always satisfy the simple sum rule of cosine :…”

Section: Description Of the Main Routine (Calcul_trajectoire() Subromentioning

confidence: 99%

CASINO: A new monte carlo code in C language for electron beam interaction —part I: Description of the program

1997

View full text Add to dashboard Cite

Summary: This paper is a guide to the ANSI standard C code of CASINO program which is a single scattering Monte CArlo SImulation of electroN trajectory in sOlid specially designed for low-beam interaction in a bulk and thin foil. CASINO can be used either on a DOS-based PC or on a UNIX-based workstation. This program uses tabulated Mott elastic cross sections and experimentally determined stopping powers. Function pointers are used for the most essential routine so that different physical models can easily be implemented. CASINO can be used to generate all of the recorded signals (x-rays, secondary, and backscattered) in a scanning electron microscope either as a point analysis, as a linescan, or as an image format, for all the accelerated voltages (0.1-30 kV). As an example of application, it was found that a 20 nm Guinier-Preston Mg 2 Si in a light aluminum matrix can, theoretically, be imaged with a microchannel backscattered detector at 5 keV with a beam spot size of 5 nm.

show abstract

“…This formula is more complex than the one of Soum et al (1979), but we have noticed that their equation does not always satisfy the simple sum rule of cosine :…”

Section: Description Of the Main Routine (Calcul_trajectoire() Subromentioning

confidence: 99%

CASINO: A new monte carlo code in C language for electron beam interaction —part I: Description of the program

1997

View full text Add to dashboard Cite

show abstract

“…In the case of a bulk specimen (wafer) we take into account only elastic events in order to reduce the computation time [8].…”

Section: Monte Carlo Methodmentioning

confidence: 99%

Nanolithography by high energy electron beam

Camon

Martinez

Balladore

1988

Rev. Phys. Appl. (Paris)

Self Cite

View full text Add to dashboard Cite

“…Mott [6] Partial Cross Section Mott [6] Effective Section of Ionisation Casnati [7] Ionisation Potential Joy and Luo(1989) [8] Directing Cosin Soum et al(1979) [9] dE/dS Calculation Joy and Luo(1989) [8] る．一方，Mg Kα の相対強度比は 0.495（15kV）か . solid circles, squares, diamonds and triangles show the mass absorption coefficients of Henke et.…”

Section: Total Cross Sectionmentioning

confidence: 99%

Electron microprobe analysis of Mg-Ge alloy - Examination of the mass absorption coefficient of Ge for Mg Kα -

Nishio

Yosyikawa

Tanuma

et al. 2017

JSA

View full text Add to dashboard Cite

Electron probe micro analyzer is used for the composition analysis of a wide variety of materials, and its quantification is almost established as a ZAF method. The quantification of MgGe alloy, however, showed an anomalously-high total concentration (i.e. 120%) of the elements of Mg and Ge. The previous analysis of MgGe alloy was not considered to be correct according to the additional fact that the estimated concentrations of Mg increases with the accelerating voltage of the electron beam. Because the mass absorption coefficient of Ge for Mg Kα, is an essential parameter of the ZAF method, we then determined the mass absorption coefficient of Ge for Mg Kα by using measured X-ray peak intensity ratios of Ge and Mg of MgGe alloy to the standard materials (MgO and Ge). The resulting mass absorption coefficient of Ge for Mg Kα was 5561±200 cm 2 /g which were obtained between the electron-beam accelerating voltage of 15kV ~ 30kV. It is smaller than the previous mass absorption coefficient of 7510 cm 2 /g, which lead the anomalous quantification error. The difference of the mass absorption coefficients must be caused by the difficulty of the measurement of the mass absorption coefficient of Ge for Mg Kα, the energy of which are close to the Ge L Ⅰ and L Ⅱ absorption edges.

show abstract

Monte Carlo calculations on electron multiple scattering in amorphous or polycrystalline targets

Cited by 20 publications

References 27 publications

CASINO: A new monte carlo code in C language for electron beam interaction —part I: Description of the program

CASINO: A new monte carlo code in C language for electron beam interaction —part I: Description of the program

Nanolithography by high energy electron beam

Electron microprobe analysis of Mg-Ge alloy - Examination of the mass absorption coefficient of Ge for Mg Kα -

Contact Info

Product

Resources

About