Monte-Carlo simulation and experimental study of the effect of internal charging on the electron emission yield of amorphous SiO2 thin films

Gibaru, Quentin; Inguimbert, C.; Belhaj, Mohamed; Raine, M.; Lambert, Damien

doi:10.1016/j.elspec.2022.147265

Cited by 2 publications

(2 citation statements)

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“…Simulation of individual trajectories proceeds by explicitly modelling the physics of each interaction leading to a change of the particles kinetic parameters such as momentum and spin. Detailed descriptions about the simulation of individual electron trajectories can be found in excellent reviews of this subject Kyser and Murata (1974); Gibarua et al (2022); Shimizu and Ding (1992); Ding (1990); Wagner (2001); Werner (2001).…”

Section: Monte Carlo Algorithms For Electron Beam Techniquesmentioning

confidence: 99%

“…Below about 100 eV, measurements of the elastic reflectivity from surfaces no longer agree quantitatively with atomic cross sections even for a noble metal such as Au Ridzel (2019). Furthermore, phonon scattering needs to be taken into account at these energies, for which several models have been proposed Ziman (1960Ziman ( , 1972; Schreiber (2001); Fitting et al (2001); Schreiber and Fitting (2002); Pop et al (2004); Akkerman and Murat (2015); Sparks et al (1981); Fischetti and Laux (1996); Gibarua et al (2022), leading to widely different values for the transport mean free path for phonon scattering. Again, it is not easy to experimentally decide which of these models yields the best description and usually that model is chosen for which the required parameters are the most readily available.…”

Section: Low Energy Electronsmentioning

confidence: 99%

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Electron beams near surfaces: the concept of partial intensities for surface analysis and perspective on the low energy regime

Werner

2023

Front. Mater.

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Electron beam techniques are indispensable tools for the analysis of surfaces in fundamental as well as applied fields of science and technology. Significant improvements have been made in the past decades in the quantitative understanding of electron spectra, particularly with respect to the near-surface transport of signal electrons. The concept of partial intensities is a simple approach providing physical insight into transport of electrons in solids, a numerically convenient means for spectrum modelling and an essential ingredient for spectrum interpretation. The energy-dissipation process of energetic electrons in solids is discussed from the perspective of the partial intensities, offering a unified model for any type of electron beam technique, be it in the quasi-elastic (QE) or the continuous slowing down (CSD) regime. Examples are given for modelling and analysis of electron spectra such as X-ray photoelectron spectra (XPS), Elastic peak electron spectra (EPES) and electron energy-loss spectra (EELS). The physical model as well as the quantities for electron beam interaction with solids are reviewed, and methods for spectrum modelling and analysis are presented. The examples considered demonstrate the high level of accuracy nowadays attainable for characterisation of surfaces and nanostructures employing techniques using medium energy electrons (>100 eV). This is in contrast to the low energy regime, where a number of problems prevent a similar level of understanding. The topic of low energy electrons (LEEs) is rapidly gaining importance since in this energy range the involved electrons not only act as signal carriers, but also actively participate in electrochemical processes of importance in fields ranging from nanotechnology to life sciences. Issues of future importance in the field of LEEs are discussed and recent developments such as the 2-dimensional electron cascade in the scanning field electron microscope are highlighted.

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Section: Monte Carlo Algorithms For Electron Beam Techniquesmentioning

confidence: 99%

Section: Low Energy Electronsmentioning

confidence: 99%

Electron beams near surfaces: the concept of partial intensities for surface analysis and perspective on the low energy regime

Werner

2023

Front. Mater.

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Experimental and Monte-Carlo study of double-hump electron emission yield curves of SiO2 thin films

Gibaru

Inguimbert

Belhaj

et al. 2023

Journal of Applied Physics

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In this work, we have made experimental measurements of multiple-hump total electron emission yield (TEEY) curves on SiO2 thin films. A Monte-Carlo electron transport model, published in Gibaru et al., J. Electron Spectrosc. Relat. Phenom. 261, 147265 (2022), has been developed to analyze the physical reasons of such atypical behavior. It is shown that the multiple-hump TEEY curves of thin dielectric layers are due to internal recombination effects. However, such kind of phenomenon is demonstrated to be strongly correlated to the incident current density. This analysis reveals that the double-hump TEEY curves observed commonly on insulators are also most probably a measurement artifact, tied to the operating parameters of the electron gun. A careful choice of experimental parameters can eliminate this artifact, by using a constant current density that is also low enough to limit recombination effects.

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Monte-Carlo simulation and experimental study of the effect of internal charging on the electron emission yield of amorphous SiO2 thin films

Cited by 2 publications

References 63 publications

Electron beams near surfaces: the concept of partial intensities for surface analysis and perspective on the low energy regime

Electron beams near surfaces: the concept of partial intensities for surface analysis and perspective on the low energy regime

Experimental and Monte-Carlo study of double-hump electron emission yield curves of SiO2 thin films

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