Monte Carlo simulation of 1–10-KeV electron scattering in a gold target

Abstract

A new Monte Carlo simulation of electron scattering has been achieved for extension to the low-energy region and to heavy elements such as Au. The Kanaya-Okayama equation, which includes adjustable parameters, is used for the calculation of energy loss instead of the Bethe equation. Further, the Mott equation, which is obtained from a more exact treatment for elastic scattering, is used instead of the screened Rutherford equation for angular scattering. The calculated results are compared with various kinds of experimental results such as the electron range, the backscattering coefficient, and the depth distribution of energy dissipation. The theoretical results are found to be in satisfactory agreement with the experimental results.

Numerical modeling of materials processing applications of a pulsed cold cathode electron gun

“…18,19,24,26,27 For instance, Kotera et al 19 show that for heavy elements the main source of error is the screened Rutherford cross section, particularly at small electron energies ͑1-10 keV͒. Murata et al 27 analyze the importance of the production of secondary electrons in the energy dissipation curve; for small energies ͑several keV͒ and light elements Valkealahti et al 26 show that the screened Rutherford cross section underestimates the elastic cross section, and produces slightly wider energy dissipation curves.…”

“…The Monte Carlo techniques have already proven their ability to produce accurate results for many of the phenomena involved in the irradiation of materials with electron beams, particularly in the energy region of interest here ͑tens of keV͒. [18][19][20][25][26][27][28][29][30][31] A more detailed account of the Monte Carlo technique is given in Ref. 17, we will summarize here the most relevant features for completeness.…”

“…17 It has been shown to be an accurate tool for electron beam energy deposition calculations, [18][19][20][21] and has been chosen here because the method has no adjustable paa͒ Electronic mail: jetchev@mate.dm.uba.ar rameters and can give reliable results even for complex materials.…”

The Excitation Depth Distribution Function for Auger Electrons Created by Electron Impact

“…U \ E/E c , E c Despite these drastic simpliÐcations of the theoretical model, the calculated /(oz) functions compared well with experiment. 34,35 A more advanced theoretical model has been developed by Kotera et al 25 and Murata et al26 to determine the /(oz) function at kilovolt energies. The partial wave expansion method was used to calculate the elastic scattering events, and di †erent modiÐcations of the Bethe equation were made to describe the energy loss.…”

Perspectives in electron scattering by microstructures

“…In order to go beyond the FBA, the partial-wave (PW) expansion method can be used [20]. A comparison of the Rutherford to the PW differential cross-section shows that the RCS underestimates the probability of elastic scattering at small and large angles, and overestimates it at intermediate angles [21,22]. While the RCS declines monotonically as the angle 0 increases from 0 to ~, the PW cross-section exhibits a diffraction pattern.…”