2023
DOI: 10.1063/5.0146533
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Monte Carlo simulation of ion kinetics in nitrogen and oxygen plasmas under non-uniform electric field conditions

Abstract: The kinetics of N4+ and O− ions was numerically studied in nitrogen and oxygen plasmas in a highly non-uniform electric field. Mean ion energy and reaction rate coefficients in a background gas at pressures from 1 to 10 Torr were calculated through a Monte Carlo simulation. The ion characteristics followed the local reduced electric field at high pressures, whereas nonhydrodynamic effects leading to a nonlocal dependence of the mean ion energy and rate coefficients on the field were obtained at low pressures. … Show more

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