Monte Carlo simulation of sinusoidally modulated superlattice growth

Abstract

The fabrication of ZnSe/ZnTe superlattices grown by the process of rotating the substrate in the presence of an inhomogeneous flux distribution instead of successively closing and opening of source shutters is studied via Monte

A kinetic Monte Carlo simulation of film growth by physical vapor deposition on rotating substrates

“…Each atom will have a finite probability of jumping, provided that there are available neighboring voids into which it can jump. The system is modeled using the kinetic Monte Carlo (KMC) approach, in which the sequence of configurations generated by MC procedures are related to the time evolution of the system [25][26][27][28][29]. This method can employ relatively large numbers of atoms over long time-scales, in contrast to molecular dynamics simulations that are limited to nanosecond time-scales.…”