MORPHIC: Programmable photonic circuits enabled by silicon photonic MEMS

Bogaerts, Wim; Sattari, Hamed; Edinger, Pierre; Takabayashi, Alain Yuji; Zand, Iman; Wang, Xiaojing; Ribeiro, A. B. Lobo; Jezzini, Moises; Errando-Herranz, Carlos; Talli, Giuseppe; Saurav, Kumar; Porcel, Marco Garcia; Verheyen, Peter; Abasahl, Banafsheh; Niklaus, Frank; Quack, Niels; Gylfason, Kristinn B.; O’Brien, Peter; Khan, Umar

doi:10.1117/12.2540934

Cited by 26 publications

(21 citation statements)

References 56 publications

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“…However, such a two-layer platform is not readily compatible with standard silicon photonic technology offerings, and it has limited possibility to include mature silicon photonics components, such as carrier-depletion-based phase shifters and high-speed detectors next to the MEMS components. To pave the way for integration of the suspended structures and MEMS into standard silicon photonics, we enhance IMEC's iSiPP50G standard silicon photonics platform [15] with the MEMS technology and augment the current library with additional photonic MEMS components [16].…”

mentioning

confidence: 99%

Compact broadband suspended silicon photonic directional coupler

Sattari¹,

Takabayashi²,

Verheyen³

et al. 2020

Opt. Lett.

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Directional couplers are extensively used in photonic integrated circuits as basic components for efficient on-chip photonic signal routing. Conventionally, directional couplers are fully encapsulated in the technology’s waveguide cladding material. In this Letter, we demonstrate a compact broadband directional coupler, fully suspended in air and exhibiting efficient power coupling in the cross state. The coupler is designed and built based on IMEC’s iSiPP50G standard platform, and hydrofluoric (HF) vapor-etching-based post-processing allows to release the freestanding component. A low insertion loss of 0.5 dB at λ = 1560 n m and a 1 dB bandwidth of 35 nm at λ = 1550 n m have been confirmed experimentally. With a small footprint of 20 µ m × 30 µ m and high mechanical stability, this directional coupler can serve as a basic building block for large-scale silicon photonic microelectromechanical systems (MEMS) circuits.

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confidence: 99%

Compact broadband suspended silicon photonic directional coupler

Sattari¹,

Takabayashi²,

Verheyen³

et al. 2020

Opt. Lett.

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“…While this mechanism does not induce optical losses, it is power hungry and can be a cause of thermal crosstalk between the many actuators [38]. Alternative actuation mechanisms such as micro-electromechanical systems (MEMS) [39]- [41], piezo-electric tuners [42], liquid crystals [43], [44] or Pockels-effect based phase shifters [45]- [47] could address these issues, but these techniques still have to reach sufficient maturity. The choice of the actuator type also depends strongly on the speed at which the circuit needs to be configured.…”

Section: More Than Just Photonsmentioning

confidence: 99%

Programmable Photonics: An Opportunity for an Accessible Large-Volume PIC Ecosystem

Bogaerts

Rahim

2020

IEEE J. Select. Topics Quantum Electron.

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We look at the opportunities presented by the new concepts of generic programmable photonic integrated circuits (PIC) to deploy photonics on a larger scale. Programmable PICs consist of waveguide meshes of tunable couplers and phase shifters that can be reconfigured in software to define diverse functions and arbitrary connectivity between the input and output ports. Off-the-shelf programmable PICs can dramatically shorten the development time and deployment costs of new photonic products, as they bypass the design-fabrication cycle of a custom PIC. These chips, which actually consist of an entire technology stack of photonics, electronics packaging and software, can potentially be manufactured cheaper and in larger volumes than application-specific PICs. We look into the technology requirements of these generic programmable PICs and discuss the economy of scale. Finally, we make a qualitative analysis of the possible application spaces where generic programmable PICs can play an enabling role, especially to companies who do not have an in-depth background in PIC technology.

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“…In addition, the inclusion of silicon photonic MEMS process in foundry could open up a promising route to build programmable photonics circuits. 20 In this paper, we report on a 32 × 32 silicon photonic MEMS switch fabricated on 200-mm wafers at a commercial complementary metal-oxide-semiconductor (CMOS) foundry (TSI Semiconductors). Switching is accomplished by directional couplers with continuously tunable gaps.…”

Section: Introductionmentioning

confidence: 99%

32 × 32 silicon photonic MEMS switch with gap-adjustable directional couplers fabricated in commercial CMOS foundry

Han

Béguelin

Ochikubo

et al. 2021

J. Optical Microsystems

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We report on a 32 × 32 silicon photonic micro-electro-mechanical-system (MEMS) switch with gap-adjustable directional couplers. The switch is fabricated on 200-mm silicon-oninsulator wafers in a commercial complementary metal-oxide-semiconductor (CMOS) foundry. The fabricated device has a maximum on-chip loss of 7.7 dB and an extinction ratio of 50.8 dB. The switching voltage is 9.45 V and the 20-dB bandwidth is 28.7 nm. Our work shows a promising path for mass production of silicon photonic MEMS switches in commercial CMOS foundries.

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MORPHIC: Programmable photonic circuits enabled by silicon photonic MEMS

Cited by 26 publications

References 56 publications

Compact broadband suspended silicon photonic directional coupler

Compact broadband suspended silicon photonic directional coupler

Programmable Photonics: An Opportunity for an Accessible Large-Volume PIC Ecosystem

32 × 32 silicon photonic MEMS switch with gap-adjustable directional couplers fabricated in commercial CMOS foundry

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