2019
DOI: 10.1134/s106378341907014x
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Morphological and Structural Features of Iron Oxide-Based Nanoparticle Formation under Arc Vacuum Sputtering

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Cited by 5 publications
(2 citation statements)
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“…) , and physical (pulsed laser deposition (PLD), molecular beam epitaxy (MBE), sputtering, etc. ) ,,, thin film deposition routes could be used to synthesize iron oxide thin film. Here, we review recent fabrication and developments of iron oxide thin film divided into chemical and physical fabrication routes.…”
Section: Recent Fabrications Of Iron Oxide Thin Filmsmentioning
confidence: 99%
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“…) , and physical (pulsed laser deposition (PLD), molecular beam epitaxy (MBE), sputtering, etc. ) ,,, thin film deposition routes could be used to synthesize iron oxide thin film. Here, we review recent fabrication and developments of iron oxide thin film divided into chemical and physical fabrication routes.…”
Section: Recent Fabrications Of Iron Oxide Thin Filmsmentioning
confidence: 99%
“…Sputtering is the most efficient thin film deposition method that enables the fabrication of large-scale iron oxide thin films. A sputtering method was used to successfully grow Fe 3 O 4 and the polymorph Fe 2 O 3 . ,, Similar to MBE and PLD, substrate temperature and oxygen pressure are important for the growth process of iron oxide thin film by the sputtering method. The difference in that thin film growing process is about how to escape the target particles and hence transfer onto the surface of the substrate (Figure ), evaporation temperature of the effusion cells of the target in MBE, laser energy to ablate the target in PLD, and radio frequency (RF) or direct current (DC) power in the sputtering method …”
Section: Recent Fabrications Of Iron Oxide Thin Filmsmentioning
confidence: 99%