A precise control of the dimension of carbon nanotubes (CNTs) in their vertical array could enable many promising applications in various fields. Here, we demonstrate the growth of vertically aligned, single-walled CNTs (VA-SWCNTs) with diameters in the sub-1.5-nm range (0.98 ± 0.24 nm), by engineering a catalyst support layer of alumina via thermal annealing followed by ion beam treatment. We find out that the ion beam bombardment on the alumina allows the growth of ultra-narrow nanotubes, whereas the thermal annealing promotes the vertical alignment at the expense of enlarged diameters; in an optimal combination, these two effects can cooperate to produce the ultra-narrow VA-SWCNTs. According to micro- and spectroscopic characterizations, ion beam bombardment amorphizes the alumina surface to increase the porosity, defects, and oxygen-laden functional groups on it to inhibit Ostwald ripening of catalytic Fe nanoparticles effectively, while thermal annealing can densify bulk alumina to prevent subsurface diffusion of the catalyst particles. Our findings contribute to the current efforts of precise diameter control of VA-SWCNTs, essential for applications such as membranes and energy storage devices.