Exploring the gas-solid compatibility between insulating gas and solids materials used in electrical equipment is of great significance for determining the long-term behavior of insulating gas trifluoromethanesulonyl fluoride (CF3SO2F). The gas-solid compatibility of CF3SO2F and its decomposition products with Ag, Zn, and ZnO common surfaces has been assessed based on first-principles calculations, with SF6 as the control group. CF3SO2F has excellent gas-solid compatibility with the solid surfaces by analyzing the adsorption configurations, adsorption energies, charge transfer, adsorption height, density of states, and ab initio molecular dynamics (AIMD) results. The external electric fields do not affect the excellent compatibility between CF3SO2F and the solid surfaces. Besides, the Ag(111) surface exhibits fine gas-solid compatibility with all decomposition products benefitting from its low surface energy. Originating in the existence of the three-center-four-electron (3c4e) π bond and F atoms with strong electronegativity in SO2F2, SO2F2 has poor compatibility with the Ag(110), (100), and Zn(001) surface. SO2, COF2, and HF gases may accelerate equipment failure due to the strong adsorption strength and poor compatibility with ZnO(100) and (110) surfaces. The results provide the theoretical guidance for the engineering application and long-term performance evaluation of CF3SO2F.