2012
DOI: 10.1166/jno.2012.1402
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Morphology and Structural Properties of <I>a</I>-Si:H and <I>a</I>-SiC:H Films Controlled in Nanoscale

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Cited by 3 publications
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“…The former belongs to the symmetric stretching of Si—H bonds . The second is ascribed to the phonon mode of Si—Si bonds . The sharp Raman peak at 517 cm −1 indicates that the sample “1:0” prepared without CH 4 is highly crystallized.…”
Section: Resultsmentioning
confidence: 98%
“…The former belongs to the symmetric stretching of Si—H bonds . The second is ascribed to the phonon mode of Si—Si bonds . The sharp Raman peak at 517 cm −1 indicates that the sample “1:0” prepared without CH 4 is highly crystallized.…”
Section: Resultsmentioning
confidence: 98%
“…Notably, the position and intensity of the TO 1 band are sensitive to the short-range disorder in the films. The formation of a strongly disordered Si phase as a result of laser irradiation is also indicated by the appearance of bands attributed to the Si–Si transverse acoustic (TA, 165 cm –1 ) and longitudinal acoustic (LA, 300 cm –1 ) modes (Figure b) . Moreover, the increase of pulse fluence results in the rise of the relative intensity of the bands related to nanocrystalline/amorphous silicon species, thus confirming the more significant disorder of recrystallized Si phases.…”
Section: Resultsmentioning
confidence: 71%
“…The formation of a strongly disordered Si phase as a result of laser irradiation is also indicated by the appearance of bands attributed to the Si−Si transverse acoustic (TA, 165 cm −1 ) and longitudinal acoustic (LA, 300 cm −1 ) modes (Figure 5b). 39 Moreover, the increase of pulse fluence results in the rise of the relative intensity of the bands related to nanocrystalline/amorphous silicon species, thus confirming the more significant disorder of recrystallized Si phases. The higher pulse energy results in more efficient material melting, higher temperature of the plasma formed from the substrate and the organic solvent, and more turbulent processes occurring near the surface, thus resulting in an increased disorder in the resolidified silicon species.…”
Section: ■ Results and Discussionmentioning
confidence: 89%