Morphology and structure of ion-plated TiN, TiC and Ti(C, N) coatings

Gabriel, H. M.; Kloos, K. H.

doi:10.1016/0040-6090(84)90195-0

Cited by 61 publications

(12 citation statements)

References 4 publications

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“…However, when A is much smaller than B, the coating thickness as a function of time may be expressed as Eq. (13), and the thickness of coating will linearly depend on the iodine content.…”

Section: Influence Of Iodine Content In Environment On Coating Thicknessmentioning

confidence: 99%

“…x ≈ A(t + n) (13) For long processing time (t n and t B/4A 2 ), the coating growth approaches the parabolic growth law according to:…”

Section: Modelingmentioning

confidence: 99%

“…Moreover, TiC has a high melting temperature, good thermal shock resistance, and good chemical and physical sputtering resistance under bombardment by highly energetic particles [6]. TiC coatings are produced by a chemical vapor deposition (CVD) process [7,8] as well as by a number of physical vapor deposition (PVD) processes such as sputtering [9,10], cathodic arc [11], evaporation [12] and ion plating [13]. Depending on the deposition techniques and processing conditions, film properties vary significantly [14].…”

Section: Introductionmentioning

confidence: 99%

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Formation of titanium carbide on graphite via powder immersion reaction assisted coating

Yin

Gotman

Klinger

et al. 2005

Materials Science and Engineering: A

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“…However, when A is much smaller than B, the coating thickness as a function of time may be expressed as Eq. (13), and the thickness of coating will linearly depend on the iodine content.…”

Section: Influence Of Iodine Content In Environment On Coating Thicknessmentioning

confidence: 99%

“…x ≈ A(t + n) (13) For long processing time (t n and t B/4A 2 ), the coating growth approaches the parabolic growth law according to:…”

Section: Modelingmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Formation of titanium carbide on graphite via powder immersion reaction assisted coating

Yin

Gotman

Klinger

et al. 2005

Materials Science and Engineering: A

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“…CBN inserts with appropriate edge preparation can be used for special applications especially hard turning with 60-65 HRC [9]. Tremendous amount of research work have been published on properties of TiCN coating material [12][13][14]. TiCN is a solid solution of TiN and TiC such that a thin layer coating would combine the advantages and characteristics of both [15].…”

Section: Introductionmentioning

confidence: 99%

Experimental investigation of cutting tool performance in high speed cutting of hardened X210 Cr12 cold-work tool steel (62 HRC)

Aslan

2005

Materials & Design

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“…They are implemented in fundamental research and industrial and medical applications as well [1]. These films may be characterized by an unusual combination of mechanical and tribological properties such as high hardness and toughness, superior wear and corrosion resistance, low friction, good thermal conductivity and high electric conductivity [1][2][3][4][5]. Moreover, nanocomposite structures will be applied as protective materials or hard coating for multifunctional, industrial and engineering applications [6][7][8].…”

Section: Introductionmentioning

confidence: 99%

Examination of nanocrystalline TiC/amorphous C deposited thin films

Oláh

Vereš

Sulyok

et al. 2014

Journal of the European Ceramic Society

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Abstract:The relationship between structural, chemical and mechanical properties of nanocrystalline TiC / amorphous C thin films was studied. Thin films were deposited by DC magnetron sputtering on oxidized silicon substrates in argon at 25 C° and 0.25 Pa. The input power of the carbon target was 150 W, the input power of the titanium target was varied between 15 and 50 W. It was found that all thin films consist of a few nanosized columnar TiC crystallites embedded in carbon matrix. The average size of TiC crystallites and the thickness of the carbon matrix have been found to correlate with Ti content. The mechanical properties of the films have been strictly dependent on their structure. The highest values of the nanohardness (~ 66 GPa) and Young's modulus (~ 401 GPa) were observed for the film with the highest TiC content which was prepared at 50 W of Ti target. The relationship between structural, chemical and mechanical properties of nanocrystalline TiC / amorphous C (TiC/a:C) thin films was studied. Thin films were deposited by DC magnetron sputtering on oxidized silicon (Si/SiO 2 ) substrates in argon at 25 C° and 0.25 Pa. The input power of the carbon target was kept at constant value of 150 W while the input power of the titanium target was varied between 15 and 50 W.It was found that all thin films consist of a few nanosized columnar TiC crystallites embedded in carbon matrix. The average size of TiC crystallites and the thickness of the carbon matrix have been found to correlate with Ti content in the films. The mechanical properties of the films have been strictly dependent on their structure. The highest values of the nanohardness (~ 66 GPa) and Young's modulus (~ 401 GPa) were observed for the film with the highest TiC content which was prepared at the largest input power of Ti target.The recommended keywords are: TiC/a:C, magnetron sputtering, structure, mechanical properties, XPS Looking forward your positive answer. Sincerely yours, Nikolett OlahCover Letter SummaryThe nanocomposite structures will be applied as protective materials or hard coating for multifunctional, industrial and engineering applications [6][7][8]. In previous studies only a few preparation methods for TiC films have been investigated in details. One of them, the vacuum deposition provides great flexibility for manipulating material chemistry and structure, resulting in films and coatings with special properties TiC/a:C thin films were deposited by DC magnetron sputtering at 25 °C in argon atmosphere. The films had a thickness of 400 nm and consisted of nanocrystalline TiC and amorphous carbon phases. The average size of TiC crystallites and the thickness of the amorphous carbon matrix strongly depended on deposition parameters, namely on Ti target power. Films deposited at 15 W Ti power consisted of few nanometers small TiC nanocrystallites embedded in a few ten nanometers thick carbon matrix. The increase of Ti content (with increasing Ti power) resulted in larger TiC nanocrystallites and a thinner carbon spacing between t...

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Morphology and structure of ion-plated TiN, TiC and Ti(C, N) coatings

Cited by 61 publications

References 4 publications

Formation of titanium carbide on graphite via powder immersion reaction assisted coating

Formation of titanium carbide on graphite via powder immersion reaction assisted coating

Experimental investigation of cutting tool performance in high speed cutting of hardened X210 Cr12 cold-work tool steel (62 HRC)

Examination of nanocrystalline TiC/amorphous C deposited thin films

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