Morphology evolution of glancing angle deposition Ag films on nanosphere-array substrates: Kinetic Monte Carlo simulation

Liang, Jingshu; Chen, Shuhan; Lin, En-Yu; Luo, Difan; Jiang, Shaoji

doi:10.1016/j.commatsci.2013.06.014

Cited by 8 publications

(3 citation statements)

References 36 publications

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“…The GLancing Angle Deposition (GLAD) technique is an advanced physical vapor deposition method, which atoms of a vapor stream are deposited at a large oblique angle from the substrate normal on fixed or mobile substrate [1]. It is a very useful technique which has enabled researchers to develop unique nanostructures with tailored morphology such as nanorods, nano-springs, zigzags columns [2], etc, which is hardly obtained from the normal incidence.…”

Section: Introductionmentioning

confidence: 99%

Investigation of growth and characterization of nanostructured CuIn5S8 thin films produced by glancing angle deposition

et al. 2015

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Section: Introductionmentioning

confidence: 99%

Investigation of growth and characterization of nanostructured CuIn5S8 thin films produced by glancing angle deposition

et al. 2015

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“…Some of the major advantages of thermal evaporation are its high deposition rates, simple operation, and relatively low equipment cost. Glancing angle deposition (GLAD) represents an innovative and interesting technique for the production of nanostructured materials at a low cost based on deposition under oblique incidence (OAD) [15]. The general principle is based on the spatial orientation of the substrate while the source remains fixed.…”

Section: Introductionmentioning

confidence: 99%

Structural, morphological, and optical properties of Ag_xO thin films deposited via obliquely angle deposition

Soltane

Akkari

Gallas

et al. 2023

Materials Science-Poland

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This work reports on the optical, structural, and morphological properties of silver oxide thin films obtained by postoxidation of silver deposited previously by the thermal evaporation technique. The samples were deposited on glass substrates using the oblique angle deposition technique for different angles of incidence γ (γ=0°, 20°, 40°, 60°, 75°, and 85°). γ is defined as the angle between the particle flux and the normal to the substrate. The resulting thin films were annealed in the free air at two temperatures (300°C and 400°C). X-ray diffraction (XRD), scanning electron microscopy (SEM), and UV-visible-NIR spectrophotometer were performed to study the crystal structure, as well as the morphological and optical properties (transmittance and reflectance), of the AgxO samples. X-ray diffraction analysis revealed the presence of the AgxO phase for the silver films deposited at a high angle of incidence and for the annealing temperature 300°C. In contrast, the diffractograms of the silver films annealed at 400°C show an amorphous behavior. Optical results indicated that the direct band gap energy increases pursuant to increasing the angle of incidence γ. The absorption coefficients of AgxO thin films were found to be in the range of 103–105 cm−1. Additionally, we determined the birefringence for the layers annealed at 400°C and found that the highest value of birefringence is obtained corresponding to the angle of incidence 60°. Morphological analysis indicated that the porosity increases with the angle of incidence and highlights the amorphous nature of the films, which is attributed to the columnar structure.

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“…Due to the simple nature of the NSL templating method, ordered metal nanoparticle arrays are easily fabricated by combining NSL with metal evaporation [30]. A wide variety of metal nanoparticle array geometries have been fabricated by varying the number of nanosphere layers during metal deposition [31][32], controlling the deposition angle and duration [33,34], applying a thermal-or e-beam treatment of nanospheres [22], or by using a post-treatment of the obtained nanodisc arrays. However, the majority of nanodisc arrays obtained from an NSL template are restricted to hexagonally ordered triangular arrays, because the metal layer is deposited into interstitial spaces among nanospheres [32].…”

Section: Introductionmentioning

confidence: 99%

Fabrication of metallic nanodisc hexagonal arrays using nanosphere lithography and two-step lift-off

Huang¹,

Ratchford²,

Pehrsson³

et al. 2016

Nanotechnology

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Nanosphere lithography (NSL) has been widely used as an inexpensive method to create periodic arrays of metallic nanoparticles or nanodiscs on substrates. However, most nanodisc arrays derived from a NSL template are restricted to hexagonally-ordered triangular arrays because the metal layer is deposited onto the interstices between the nanospheres. Metallic nanodisc arrays with the same arrangement as the original nanosphere array have been rarely reported. Here, we demonstrate a facile, low-cost method to fabricate large-area hexagonal arrays of metallic nanodiscs using an NSL template combined with a two-step lift-off process. We employ a bi-layer of two dissimilar metals to create a re-entrant sidewall profile to undercut the sacrificial layer and facilitate the final lift-off of the metallic nanodiscs. The quality of the nanodisc pattern and the array periodicity is determined using statistical image analysis and compared to the original nanosphere array in terms of size distribution, surface smoothness, and array pitch. This nanodisc array is used as an etch mask to create a vertically-aligned Si nanowire array. This combined approach is a scalable and inexpensive fabrication method for creating relatively large-area, ordered arrays of various nanostructures.

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Morphology evolution of glancing angle deposition Ag films on nanosphere-array substrates: Kinetic Monte Carlo simulation

Cited by 8 publications

References 36 publications

Investigation of growth and characterization of nanostructured CuIn5S8 thin films produced by glancing angle deposition

Investigation of growth and characterization of nanostructured CuIn5S8 thin films produced by glancing angle deposition

Structural, morphological, and optical properties of Ag_xO thin films deposited via obliquely angle deposition

Fabrication of metallic nanodisc hexagonal arrays using nanosphere lithography and two-step lift-off

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Morphology evolution of glancing angle deposition Ag films on nanosphere-array substrates: Kinetic Monte Carlo simulation

Cited by 8 publications

References 36 publications

Investigation of growth and characterization of nanostructured CuIn5S8 thin films produced by glancing angle deposition

Investigation of growth and characterization of nanostructured CuIn5S8 thin films produced by glancing angle deposition

Structural, morphological, and optical properties of AgxO thin films deposited via obliquely angle deposition

Fabrication of metallic nanodisc hexagonal arrays using nanosphere lithography and two-step lift-off

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Structural, morphological, and optical properties of Ag_xO thin films deposited via obliquely angle deposition