Morphology evolution of homoepitaxial growth of aluminum nitride by hydride vapor phase epitaxy

Sun, Kewei; Wang, Zaien; Wang, Shuang; Zhang, Song

doi:10.1016/j.jcrysgro.2023.127503

Journal of Crystal Growth

2024

DOI: 10.1016/j.jcrysgro.2023.127503

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Morphology evolution of homoepitaxial growth of aluminum nitride by hydride vapor phase epitaxy

Kewei Sun,

Zaien Wang,

Shuang Wang

et al.

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Morphology evolution of homoepitaxial growth of aluminum nitride by hydride vapor phase epitaxy

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References 28 publications

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