Morphology, microstructure, and residual stress in EBPVD erbia coatings

Jankowski, Alan F.; Saw, C. K.; Ferreira, James; Harper, Jennifer S.; Hayes, Jeffrey P.; Pint, Bruce A.

doi:10.1007/s10853-006-0658-7

Cited by 7 publications

(6 citation statements)

References 25 publications

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“…Guo et al [16] explained the formation of the B-phase by the high surface tension during formation of Er 2 O 3 nanoparticles, resulting in a high internal pressure during particle formation. We also suggest that the XRD patterns of Er 2 O 3 coatings published by Jankowski et al [11] could be explained by the formation of the B-phase at temperatures ≤580 °C. They grew the films with low energetic species by electron beam evaporation of Er 2 O 3 .…”

Section: Discussionsupporting

confidence: 64%

“…Generally, five polymorphs are reported, but only three phases (C, H, B) have been observed for Er 2 O 3 . The cubic C-phase is the stable phase below 2600 K and is usually formed during preparation of Er 2 O 3 coatings, even if some authors report about unidentified peaks in x-ray diffractograms [7,11,12]. Above 2600 K the hexagonal H-phase occurs.…”

Section: Introductionmentioning

confidence: 99%

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Monoclinic B-phase erbium sesquioxide (Er2O3) thin films by filtered cathodic arc deposition

et al. 2009

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Er 2 O 3 sesquioxide thin films in the uncommon, monoclinic phase were produced for the first time by filtered cathodic arc deposition on Eurofer steel substrates. This was achieved by applying a sample bias of -250 V and deposition temperatures ≤400 °C. XRD texture analysis revealed a strong preferred orientation of the B-phase crystallites. Deposition at 600 °C without bias voltage resulted in thin films showing the regular cubic phase. A dense, columnar structure was found for both phases by scanning transmission electron microscopy.

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Section: Discussionsupporting

confidence: 64%

Section: Introductionmentioning

confidence: 99%

Monoclinic B-phase erbium sesquioxide (Er2O3) thin films by filtered cathodic arc deposition

et al. 2009

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“…It has high thermodynamic stability, high thermal stability, high dielectric constant, wide band gap, high photo response and low permeation of hydrogen isotopes. Thus, Er2O3 coating is a promising candidate for applications such as protective coatings at fusion power plants [1,2], high dielectric gate material as a replacement for SiO2 gate insulators [3] and optoelectronic applications [4].…”

Section: Introduction*mentioning

confidence: 99%

“…Er2O3 can be deposited using various methods, including laser ablation [4], electron-beam evaporation [3], sol-gel and metal-organic decomposition [5], metal-organic chemical vapor deposition [2], magnetron sputtering [6] and filtered vacuum arc deposition, FVAD [1,7]. Among these techniques, FVAD is promising, because its plasma produces coatings with higher packing density and better adhesion than other techniques, due to high-energy metal plasma ions impinging the coated substrate.…”

Section: Introduction*mentioning

confidence: 99%

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Thermal Stability of Filtered Vacuum Arc Deposited Er2O3 Coatings

Zukerman¹,

Goldenberg²,

Zhitomirsky³

et al. 2015

J. Coat. Sci. Technol.

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Erbium oxide (Er2O3) coatings were deposited using filtered vacuum arc deposition (FVAD) and their structure and thermal stability were studied as a function of fabrication parameters. The coatings were deposited on silicon wafer and tantalum substrates with an arc current of 50 A and a deposition rate of 1.6 ± 0.4 nm/s. The arc was sustained on truncated cone Er cathodes. The influence of oxygen pressure (P= 0.40-0.93 Pa), bias voltage (Vb= -20, -40 or grounded) and substrate temperature (room temperature (RT) or 673K) on film properties was studied before and after post deposition annealing (1273K for 1 hour, at P~ 1.33 Pa). The coatings were characterized using X-ray diffraction (XRD), optical microscopy, scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS) and Knoop Hardness.Optical microscope images indicated that the coatings had very low macroparticle concentration on their surface. The macroparticle diameters were less than 2.5 μm. The coatings were composed of only Er2O3 without any metallic phase under all deposition parameters tested. The coatings deposited on RT substrates were XRD amorphous and had a featureless cross-section microstructure. However, the coatings deposited on 673K heated substrates had a C-Er2O3 structure with (222) preferred orientation and weak columnar microstructure. The coating hardness varied with deposition pressure and substrate bias, and reached a maximum value of 10 GPa at P = 0.4 Pa and Vb = -40 V. The post-deposition annealing caused crystallization, and the coatings hardness dropped to 4 GPa with thermal treatment. However, after postdeposition annealing, no peeling or cracking appeared at the coating surface or the interface with the substrate.

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Microstructure and mechanical properties of Mg–Gd–Zr alloys with low gadolinium contents

Deng

Zhao

et al. 2011

J Mater Sci

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Morphology, microstructure, and residual stress in EBPVD erbia coatings

Cited by 7 publications

References 25 publications

Monoclinic B-phase erbium sesquioxide (Er2O3) thin films by filtered cathodic arc deposition

Monoclinic B-phase erbium sesquioxide (Er2O3) thin films by filtered cathodic arc deposition

Thermal Stability of Filtered Vacuum Arc Deposited Er2O3 Coatings

Microstructure and mechanical properties of Mg–Gd–Zr alloys with low gadolinium contents

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