Motion Control of Wafer Scanners in Lithography Systems: From Setpoint Generation to Multistage Coordination

Song, Fazhi; Liu, Yang; Dong, Yue; Chen, Xinkai; Tan, Jiubin

doi:10.1109/tim.2024.3413202

IEEE Trans. Instrum. Meas.

2024

DOI: 10.1109/tim.2024.3413202

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Motion Control of Wafer Scanners in Lithography Systems: From Setpoint Generation to Multistage Coordination

Fazhi Song,

Yang Liu,

Yue Dong

et al.

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Cited by 8 publications

References 246 publications

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Paradigm shift in implementing smart technologies for machinery optimisation in manufacturing using decision support system

Ji,

Zhang,

Wang

et al. 2025

Alexandria Engineering Journal

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Paradigm shift in implementing smart technologies for machinery optimisation in manufacturing using decision support system

Ji,

Zhang,

Wang

et al. 2025

Alexandria Engineering Journal

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A novel development of wide voltage supply DC–DC converter for fuel stack application with PSO-ANFIS MPPT controller

Hussaian Basha,

Alsaif

2024

Sci Rep

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The present power production companies are working on renewable energy systems because their features are more reliable for the local energy consumers, high continuity in the energy production, and less cost is required for maitainence. In this article, the proton exchange membrane fuel stack (PEMFS) renewable energy is utilized to supply energy to the automotive systems. Here, the PEMFS is selected because of its merits are high energy density, quick system response concerning the source operational temperature, and more suitable for electric vehicle application. However, the PEMFS supplied voltage is completely nonlinear which is solved by utilizing the modified particle swarm optimization with adaptive neuro-fuzzy inference system (MPSO with ANFIS) controller. This hybridization-based maximum power point tracking controller provides more accuracy, high power point identifying speed, best dynamic response at different fuel stack functioning temperature conditions, and easy maitainence. Here, the fuel stack generated current is very high which is optimized by introducing the new DC–DC converter. The advantages of this DC–DC converter are more voltage transformation ratio, low-level voltage stress appearing across the switches, and wide voltage gain. The overall system is investigated by utilizing the MATLAB/Simulink tool.

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Design and development of an intelligent zone based master electronic control unit for power optimization in electric vehicles

Prabhakaran,

Thirumoorthi,

Sri Dhivya Krishnan

2024

Sci Rep

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Motion Control of Wafer Scanners in Lithography Systems: From Setpoint Generation to Multistage Coordination

Cited by 8 publications

References 246 publications

Paradigm shift in implementing smart technologies for machinery optimisation in manufacturing using decision support system

Paradigm shift in implementing smart technologies for machinery optimisation in manufacturing using decision support system

A novel development of wide voltage supply DC–DC converter for fuel stack application with PSO-ANFIS MPPT controller

Design and development of an intelligent zone based master electronic control unit for power optimization in electric vehicles

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