Motion measurement system of compliant mechanisms using computer micro-vision

Abstract

Position sensing is essential to testify the validity of the mechanical design and verify the performance in micromanipulation. A practical system for non-contact micro-motion measurement of compliant nanopositioning stages and micromanipulators is proposed using computer micro-vision. The micro-motion measurement method integrates optical microscopy and an optical flow-based technique, in which the motions of complaint mechanisms are precisely detected and measured. Simulations are carried out to validate the robustness of the proposed method, while the micro-vision system and a laser interferometer measurement system are also built up for a series of experiments. The experimental results demonstrate that the proposed measurement system possesses high stability, extensibility, and precision with 0.06 µm absolute accuracy and 0.05 µm standard deviation.

Micro-Vision Based High-Precision Space Assembly Approach for Trans-Scale Micro-Device: The CFTA Example

“…Recently, the micro-assembly technique has been widely applied to fields including aerospace, biomedical, materials science, and others MEMS, and micro-assembly robots have been developed for assembling micro-parts [ 1 , 2 , 3 ]. Micro-assembly robots are usually equipped with micro-vision for monitoring the assembly process [ 4 , 5 , 6 ]. However, micro-vision is problematic in that the larger the magnification, the smaller the field of view (FOV), that is, there is a contradiction between high precision detection and wide field of view.…”

Design and Test of a Spatial Nanopositioner for Evaluating the Out-of-Focus-Plane Performance of Micro-Vision

“…The result causes different defocus blurs. Compared with macro-vision, the accuracy degradation of micro-vision is more prominent [ 6 , 7 , 8 , 9 , 10 , 11 ]. Out-of-focus-plane displacements of moving targets are more serious than those of stationary objects.…”