Motion performance measurement and optimization of motorized stages using tightly focused laser marking

Liu, Xing; Chen, Guodong; Zheng, Jijian; Xu, Xiaozhong; Gao, Tianyu; Wei, Tao; Wei, Jingsong

doi:10.1117/1.oe.61.3.034106

Cited by 2 publications

(1 citation statement)

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“…Meanwhile, methods based on reflected spot signal are widely used because of their high processing efficiency and low cost. Such as Foucault knife-edge method, Eccentric light beam method, Critical angle method, Astigmatic method, etc [17][18] . However, when these methods are applied to transparent or semi-transparent samples, errors will occur due to the low reflectivity of the sample surface [19][20] .…”

Section: Introductionmentioning

confidence: 99%

Defocusing detection of high-speed imaging for samples with arbitrary pattern structures

Gao

Wei

2022

Thirteenth International Conference on Information Optics and Photonics (CIOP 2022)

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High-speed imaging is very important in the semiconductor optical mask field and biology and life sciences. There have been countless auto-focusing methods based on reflected light for improving the imaging efficiency. However, these methods are not suitable for transparency or semi-transparency samples. There are some common characteristics for the samples, such as disorder and irregular for the structures on the sample surfaces transparency or semi-transparency. Focusing errors would occur due to the uneven reflectivity of the sample surface. This work presents a transmitted light spot method to solve the auto-focusing problem for the transparency or semi-transparency samples. The trace of transmitted light is simulated, and the expression of the focusing error signal is derived and given. The relationships between the defocus amount and focus error signal are calculated, and the results are experimentally demonstrated, accordingly. This method is expected to be applied to high-speed optical imaging.

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Section: Introductionmentioning

confidence: 99%

Defocusing detection of high-speed imaging for samples with arbitrary pattern structures

Gao

Wei

2022

Thirteenth International Conference on Information Optics and Photonics (CIOP 2022)

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High-precision defocus detection through a bevel-axial stripe pattern projection method

Gao,

Wei,

et al. 2024

Appl. Opt.

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Fine micro/nanopattern structures are widely applied to optical elements such as gratings and metasurface elements. These structures are generally fabricated through a high numerical aperture (NA) laser-writing lithography system. During the laser writing, the sample will defocus due to the up-and-down motion errors of the motorized stage. In this work, a high-precision defocus detection module with a bevel-axial stripe pattern projection method has been established. The theoretical calculations and experimental results indicate that, for a laser-writing system with a projection light source wavelength of 405 nm and objective lens with an NA of 0.80, the defocus detection accuracy is 40 nm and the defocus detection range is 20 µm, which can meet the requirements for a high NA laser-writing system. This work can be applied to autofocusing or autotracking of a direct laser-writing lithography system.

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Motion performance measurement and optimization of motorized stages using tightly focused laser marking

Cited by 2 publications

References 0 publications

Defocusing detection of high-speed imaging for samples with arbitrary pattern structures

Defocusing detection of high-speed imaging for samples with arbitrary pattern structures

High-precision defocus detection through a bevel-axial stripe pattern projection method

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