Movable parallel plate RF MEMS switch with wide frequency response

Bhatasana, Piyush; Pujara, Dhaval; Bera, Subhash Chandra

doi:10.1109/aemc.2015.7509162

Cited by 3 publications

(1 citation statement)

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“…The most commonly used mechanical switches are coaxial switches, PIN diodes MOSFET and BJT transistors are used for semiconductor switches. BJT can switch faster due to less capacitance the capacitive RF MEMS switches run on frequencies of 4 GHz due to low dielectric constants [5]. Many of the RF MEMS switches are configured in an unpackaged model, but for reconfigurable circuit implementations, the packaged RF MEMS switches are used.…”

Section: Introductionmentioning

confidence: 99%

Electromechanical and Rf Performance Analysis of Series Configuration Based Mems Switch

Ganesh¹,

Pardhasaradhi²,

Lakshmi³

et al. 2020

jcr

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The paper presents a RF MEMS (Radio-Frequency-Micro-Electro-Mechanical-System) of cantilever series switch which is developed with low actuation voltage which depends upon the beam characteristics and the gap between the plane and metal beam. The MEMS series switch that designed is operating with a frequency range (0-60GHz) and it provides control of the other devices. The RF MEMS switching component consists of a electrode with tuning fork shaped which is fixed using anchor points on coplanar waveguide lines to decrease the actuation voltage and the insertion loss of the switch. The Air gap in between the tuning fork shaped electrode and actuation electrode of RF MEMS series switch is designed to boost the isolation attributes of the switch with less actuation voltage. The switching voltage for designing the switch is 18 V. The designed RF MEMS series switch can be used for subsystem level for broadband applications and communication devices.

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Section: Introductionmentioning

confidence: 99%