Moving coil type electromagnetic microactuator using metal/silicon driving springs and parylene connecting beams for pure in-plane large motion in three axes

Wang, Huayu; Yamada, Shunsuke; Tanaka, Shuji

doi:10.1016/j.sna.2022.113606

Cited by 3 publications

(1 citation statement)

References 22 publications

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“…With the rapid development of mechatronics, typical examples such as micro-actuators, micro-generators, micro-switches, and micro-beams have been used to manufacture the various structures and models of cantilever beams [1][2][3][4][5][6]. Meanwhile, smart materials have been developed in recent decades and these can be used to manufacture controller components [7][8][9][10][11][12][13].…”

Section: Introductionmentioning

confidence: 99%

An Analytic Solution for the Dynamic Behavior of a Cantilever Beam with a Time-Dependent Spring-like Actuator

Chang¹,

Tu²,

Huang

2023

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The purpose of this study is to derive an analytical solution for a cantilever beam with a novel spring-like actuator that behaves like a time-dependent spring and to study the dynamic behavior of the system. A time-dependent spring was set at the free end of the cantilever beam to model the novel spring-like actuator. First, the boundary conditions were transformed from being nonhomogeneous to being homogeneous using the shifting function method. The solution of the analytic series was then obtained by using the expansion theorem method. The correctness of the proposed analytical solution was verified by comparing the results with those obtained via the separation of variables in the special extreme case of a constant spring coefficient. We took the free end of a cantilever beam with harmonic spring stiffness and an external periodic unit load as an example. The influence of the actuator parameters, such as the effect of the magnitude and the frequency of the time-dependent spring stiffness on the resonance frequency, was investigated. An important new result was found, i.e., that the resonance frequency is clearly dependent on the magnitude and the frequency of the spring-like actuator in the first two modes, but not in the third and fourth modes. In practical engineering applications, system resonance can be avoided by adjusting the magnitude and frequency of the actuator.

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