This paper proposed the transformer characteristic analysis method for the wireless power transfer (WPT) device and linear motor (LM) integration system that can be applied to industrial cleanroom transfer systems. A cable is required to supply the power in conventional systems. In comparison, the proposed system utilizes a WPT device that can simplify power transfers and make a better space utilization. The shape of the wireless power transmission system is proposed along with the discussion of the 2D FEA analysis method about the inductance analyzing method, which are important parameters in magnetic coupling. In addition, ferrite iron loss was calculated based on the analysis results, and applied to the entire modeling circuit to verify the validity of the measured and analyzed values. Finally, the proposed analysis method for the transformer coupling characteristics of the wireless power transfer combined with the transfer system is verified by experiments and simulations.