MOVPE growth of Ga(AsBi)/GaAs using different metalorganic precursors

Novel Stibano Amines: Synthesis and Reactivity towards Group 13 Element Organics

“…The antimony compound tBu 2 SbCl was synthesized via the reaction of SbCl 3 with tBuMgCl based on previous reports by Hartmann, Kühl, and Issleib. [5,6] A slight access of the Grignard reagent is advisable to ensure twofold alkylation, the presence of small amounts of tBu 3 Sb does not affect consecutive reactions.…”

“…The molecular structure consists of a non-planar four-membered gallium nitrogen ring with a cis orientation of the tBu 2 …”

“…Tert-butyl groups are the favored substituents for MOVPE precursors since their use results in a low carbon incorporation into the semiconductor layer. [2] Herein an access to novel tert-butyl-substituted interpnictogens containing antimony and nitrogen as well as the reaction of one of these species with the common aluminum and gallium precursors AlEt 3 and GaEt 3 in solution are described.…”

An experimental approach for real time mass spectrometric CVD gas phase investigations

“…In addition, currently gas phase analysis of the growth of GaAs 1−x Bi x and GaP 1−x Bi x are under investigations. These MOVPE growth studies showed that the limitation of the Bi incorporation in these two different ternaries is not only explainable by strain and solubility barriers, but gas phase reactions and/or surface reactions between different precursors also seem to play a crucial role 17 – 19 .…”

Avaliação De Precursores Para Crescimento De Gainnas Pela Técnica Movpe Para Fabricação De Células Solares

“…Portanto, o objetivo principal desse projeto é identificar quais parâmetros influenciam a incorporação do carbono no GaInNAs para minimizar a contaminação residual do carbono. Para isso, são testados os diferentes parâmetros de crescimento a partir de precursores completamente isentos de metil, tais como tri-isopropil-índio (TIPIn), tri-terc-butil-gálio (TTBGa), tri-etil-gálio (TEGa), juntamente com terc-butil-arsina (TBAs) e terc-butil-hidrazina (TBHy (Dock/Chemicals 2016b;FitzGerald et al 1992;Jones et al 1992;Nattermann et al 2015), o índio (Chen et al 1993;Freer et al 1996;Irvine et al 1993;Vanchagova et al 1976), o nitrogênio (Ptak et al 2002;Sterzer et al 2016;Dock/Chemicals 2016a;Nishide et al 1998;Pohl et al 1999;Volz et al 2004) e o arsênio (Chen et al 1987;Dock/Chemicals 2015;Hakkarainen et al 2004;Nattermann et al 2015;Tang et al 2001;Volz et al 2004). Porém, até o momento, os precursores propostos neste trabalho para o crescimento de GaInNAs nunca foram utilizados simultaneamente.…”