2017
DOI: 10.1109/jstqe.2017.2677899
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MOVPE Growth of LWIR AlInAs/GaInAs/InP Quantum Cascade Lasers: Impact of Growth and Material Quality on Laser Performance

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Cited by 35 publications
(23 citation statements)
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“…It is explained by a small smearing of interfaces in the nanoheterostructure, which agrees with data from [11], where roughness of interfaces of QCL grown by the MOVPE method was studied by transmission electron microscopy. Such shift effect to the long-wavelength side was also observed in [12], where QCL was also created by the MOVPE method and the corresponding long-wavelength shift reached even 0.5-1 µm.…”
Section: Measurement Results and Discussionsupporting
confidence: 58%
“…It is explained by a small smearing of interfaces in the nanoheterostructure, which agrees with data from [11], where roughness of interfaces of QCL grown by the MOVPE method was studied by transmission electron microscopy. Such shift effect to the long-wavelength side was also observed in [12], where QCL was also created by the MOVPE method and the corresponding long-wavelength shift reached even 0.5-1 µm.…”
Section: Measurement Results and Discussionsupporting
confidence: 58%
“…The QCL has a layer structure consisting of GaInAs/AlInAs lattice matched to InP; it emits at 9.0 µm and is described in more detail in ref. 39. The 12-µm-wide QCL waveguide was fabricated by reactive ion etching followed by SiN passivation using plasma-enhanced chemical vapor deposition, sputtered Ti/Au contact deposition using a lift off, substrate thinning to 150 µm, bottom-side Ti/Au contact deposition, and cleaving to a 8-mm-long device.…”
Section: Methodsmentioning
confidence: 99%
“…К настоящему моменту ККЛ с длиной волны излучения ∼ 9 µm, выращенные на подложках InP, используют конструкции активных областей на основе: трех квантовых ям [4], двух- [5][6][7][8][9] и трехфононного резонансного рассеяния электронов [10], переходов " связанное состояние-непрерывный спектр" [2,11], набора кванто-вых ям, а также набора барьеров с различным составом по индию [12,13], безинжекторной конструкции с двухфононным резонансным рассеянием электронов [14], с непрямой схемой накачки [15], с двумя верхними уровнями [16], на основе переходов " непрерывный спектрсвязанное состояние" [17], с нерезонансным выбросом носителей заряда [18,19], с выбросом электронов за счет однофононного опустошения нижнего уровня в континуум [20,21].…”
Section: Introductionunclassified
“…Однако наивысшую выходную оптическую мощность при работе в непрерывном режиме (2 W) и коэффициент полезного действия (КПД) порядка 10% на длине волны излучения ∼ 9 µm демонстрируют ККЛ, выращенные МПЭ [18]. При этом максимальная выходная оптическая мощность и КПД ККЛ, выращенных МОГФЭ, составляют 1.4 W и 6.8% соответственно [21,22].…”
Section: Introductionunclassified