Over the last eight years we have been developing advanced MRF tools and techniques to manufacture meter-scale optics for use in Megajoule class laser systems. These systems call for optics having unique characteristics that can complicate their fabrication using conventional polishing methods. First, exposure to the high-power nanosecond and sub-nanosecond pulsed laser environment in the infrared (>27 J/cm 2 at 1053 nm), visible (>18 J/cm 2 at 527 nm), and ultraviolet (>10 J/cm 2 at 351 nm) demands ultra-precise control of optical figure and finish to avoid intensity modulation and scatter that can result in damage to the optics chain or system hardware. Second, the optics must be super-polished and virtually free of surface and subsurface flaws that can limit optic lifetime through laser-induced damage initiation and growth at the flaw sites, particularly at 351 nm. Lastly, ultra-precise optics for beam conditioning are required to control laser beam quality. These optics contain customized surface topographical structures that cannot be made using traditional fabrication processes. In this review, we will present the development and implementation of large-aperture MRF tools and techniques specifically designed to meet the demanding optical performance challenges required in largeaperture high-power laser systems. In particular, we will discuss the advances made by using MRF technology to expose and remove surface and subsurface flaws in optics during final polishing to yield optics with improve laser damage resistance, the novel application of MRF deterministic polishing to imprint complex topographical information and wavefront correction patterns onto optical surfaces, and our efforts to advance the technology to manufacture largeaperture damage resistant optics.