2006
DOI: 10.1016/j.laa.2005.04.002
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MST MEMS model order reduction: Requirements and benchmarks

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Cited by 33 publications
(28 citation statements)
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“…One application for this model is analysis of microelectromechanical systems (MEMS) devices, such as electromechanical radio frequency (RF) filters [42]. Given a simple enough shape, these devices can be modeled as 1D beams embedded in two or three dimensional space.…”
Section: Electrostatically Actuated Beam Examplementioning
confidence: 99%
“…One application for this model is analysis of microelectromechanical systems (MEMS) devices, such as electromechanical radio frequency (RF) filters [42]. Given a simple enough shape, these devices can be modeled as 1D beams embedded in two or three dimensional space.…”
Section: Electrostatically Actuated Beam Examplementioning
confidence: 99%
“…The complexity of such models (thousands up to millions of possibly nonlinear equations) causes a long computation time per time step. Thus, methods have been developed to generate compact models automatically, which offer a computation with comparable accuracy but much lower computational effort (Antoulas 2005;Rudnyi and Korvink 2002;Lienemann et al 2006). Model order reduction (MOR) is a method to generate these compact models automatically from the space-discretised, but time-continuous FEM equations.…”
Section: Model Order Reductionmentioning
confidence: 99%
“…Dissipative Particle Dynamics or Smoothed Particle Hydrodynamics (SPH) (Espa帽ol and Revenga 2003), and the phase field method (Anderson et al 2000), which is already available in commercial tools. In the framework of these investigations, we will also present a new approach to reduce computational expenses, the so called model order reduction (Lienemann et al 2006). In Sects.…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, the voltage V (m,j ) at the location of each point charge, q (m,i) , should be accounted for in the formulation. If there are 2N tot electrodes, the total electrostatic energy induced by the point charges can then be calculated as follows [10,11]:…”
Section: Formulations Based On Point Chargesmentioning
confidence: 99%
“…It is reported that the charge points at distinct locations on the electrode of a structure can be used to calculate the electrostatic interactions between electrodes [10,11]. If the point charges are defined on the lumped masses, the equations of motion can be easily obtained by expressing the electrostatic forces in terms of their positions and charge values.…”
Section: Introductionmentioning
confidence: 99%