Multi-beam angle sensor for flatness measurement of mirror using circumferential scan technology

Takahashi, Satoru; Takamasu, Kiyoshi

doi:10.1007/s12541-016-0133-6

Cited by 9 publications

(3 citation statements)

References 18 publications

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“…Through multi-point displacement measurements, it is feasible, in some way, to characterize the flatness of a surface. Up until now, the main planeness measuring instruments have included autocollimators [7,8], white light interferometers [9] and the clearance method [10]. CMMs (coordinate measuring machines) are often used to measure large movable planes [11].…”

Section: Introductionmentioning

confidence: 99%

Research and Development of a Multi-Point High-Precision Displacement Measuring System for the Installation Space of Vibration Isolation on Submarine Raft Structures

Yu,

Xu,

Wang

et al. 2023

Applied Sciences

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The well installed status of raft vibration isolation is undoubtedly of great significance in marine engineering, especially for submarines. To achieve this, the accurate measurement of the installation space of the vibration isolation is necessary. The traditional measuring technique has many drawbacks. Therefore, simultaneously measuring the multi-point spacing with high precision between two metal surfaces is the focus of this work. Based on eddy current sensing principle, a multi-point spacing measuring system with a simple structure and good measurement accuracy has been developed and reported. The system includes a sensor array component, an integrated controlling component, and a calibration platform. The measured data from multiple points are obtained at the same time through the sensor array and are uploaded to the host computer and a corresponding LabVIEW program was exploited to display, process, and store the spacing results. Furthermore, the least square algorithm has been employed to calculate the flatness of the measured metal surfaces, and the GUM (guide to the expression of uncertainty in measurement) method has been applied to evaluate the flatness error uncertainty. The experimental tests show that each measuring duration only lasts for seconds to get results and the error uncertainty of the measured surface flatness could reduce to less than 1.0 μm. The developed measuring system has better efficiency and higher precision compared to traditionally manual operations. The measuring and analysis method could also be applied to other related situations.

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Section: Introductionmentioning

confidence: 99%

Research and Development of a Multi-Point High-Precision Displacement Measuring System for the Installation Space of Vibration Isolation on Submarine Raft Structures

Yu,

Xu,

Wang

et al. 2023

Applied Sciences

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“…To measure both the flatness and thickness of a plate, a laser distance or multibeam angle sensor must be used. (10,11) These methods determine the distance to a target from both sides of a plate at the same time.…”

Section: Introductionmentioning

confidence: 99%

Flatness and Thickness Measurements of Circular Plate Component Using Laser Distance Meter

Yeh¹,

Chen²,

Chen³

et al. 2022

Sensors and Materials

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In this paper, we propose an innovative method for measuring the thickness, flatness, and Abbe angle of a disc. This innovative method includes three laser distance meters and one standard plate. In general, the three laser distance meters are used to determine the thickness and flatness of a disc. The Abbe angle is determined using the laser distance meter and reference plate. Our analytical results show that the proposed method can be used to obtain the precise thickness and flatness of a disc. The resolution of the measurement method is 1 μm. The flatness is measured by the least squares method. The front and back laser distance meters simultaneously measure the warp and wrinkle. The maximum deviation of the measured thickness of a disc is reduced by using two laser distance meters to determine the effects of warp and wrinkle. The thickness, flatness, warp, and wrinkle of a disc are measured quickly and conveniently.

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“…However, this method is only suitable for the flatness detection of small workpieces, and the instrument is relatively sensitive to vibrations, so the mechanical base must be damped with appropriate spacers. Chen et al (8) proposed a high-precision micro-scale flatness measuring machine composed of a multi-beam angle sensor (MBAS). A micro-scale flatness measuring machine is used to detect the flatness of a workpiece by rotating the workpiece around a fixed radius circle.…”

Section: Introductionmentioning

confidence: 99%

An Intelligent Vision Mobile Measurement Approach for High-speed Inspection of Large-size Flatness

Qiu¹,

Xiao²,

Wan³

et al. 2022

Sensors and Materials

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In current science and engineering, the demand for large-size surface detection has increased considerably. However, large-size surface detection presents some challenges, such as very large detection target area, discontinuous detection surface, and low detection accuracy. The current detection methods are mainly based on in-position detection and cannot meet the requirements of detection speed and accuracy for large-size surface detection. In this paper, we propose a fast detection method for large-scale flatness based on an intelligent vision mobile platform (IVMP). Specifically, by establishing the path optimization model, beam adjustment model, and largescale flatness calculation model for the IVMP, the binocular vision acquisition of large-scale target information and fast large-scale shape detection are realized. The rigidly fixed position relation of binocular vision is considered, and the parameters of the main camera can be obtained through an error equation, then the parameters of the assistant camera can be acquired quickly to calculate the three-dimensional coordinates of space points. The particle swarm optimization algorithm is integrated into the differential evolution algorithm to improve the detection speed. The IVMP is applied to the flatness detection of a satellite antenna. The experimental results show that the detection precision and efficiency of the IVMP are clearly higher than those of the laser tracking and theodolite systems.

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Multi-beam angle sensor for flatness measurement of mirror using circumferential scan technology

Cited by 9 publications

References 18 publications

Research and Development of a Multi-Point High-Precision Displacement Measuring System for the Installation Space of Vibration Isolation on Submarine Raft Structures

Research and Development of a Multi-Point High-Precision Displacement Measuring System for the Installation Space of Vibration Isolation on Submarine Raft Structures

Flatness and Thickness Measurements of Circular Plate Component Using Laser Distance Meter

An Intelligent Vision Mobile Measurement Approach for High-speed Inspection of Large-size Flatness

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