2018 22nd International Conference on Ion Implantation Technology (IIT) 2018
DOI: 10.1109/iit.2018.8807975
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Multi-beam RF Accelerators for Ion Implantation

Abstract: We report on the development of a radio frequency (RF) linear accelerator (linac) for multiple-ion beams that is made from stacks of low cost wafers. The accelerator lattice is comprised of RF-acceleration gaps and electrostatic quadrupole focusing elements that are fabricated on 4" wafers made from printed circuit board or silicon. We demonstrate ion acceleration with an effective gradient of about 0.5 MV m −1 with an array of 3 × 3 beams. The total ion beam energies achieved to date are in the 10 keV range w… Show more

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Cited by 2 publications
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“…The prototype demonstrated injection and transport of a 5-10 uA beam in a 3x3 beam array, and achieved ion acceleration of 0.5 kV/gap, for a gradient of about 0.3 MV/m [70], [71]. Building on these results, the team has used a compact, near-board RF driver to achieve up to 2.6 kV per gap [72]. While the performance of the prototype was relatively modest, the critical elements for the scalable MEMS design were established: a parallel array of beamlets, enabling high system-level current density, and the modular "stacking" of MEMS acceleration stages to enable high beam energy.…”
Section: California Institute Of Technology/los Alamos National Lab: ...mentioning
confidence: 96%
“…The prototype demonstrated injection and transport of a 5-10 uA beam in a 3x3 beam array, and achieved ion acceleration of 0.5 kV/gap, for a gradient of about 0.3 MV/m [70], [71]. Building on these results, the team has used a compact, near-board RF driver to achieve up to 2.6 kV per gap [72]. While the performance of the prototype was relatively modest, the critical elements for the scalable MEMS design were established: a parallel array of beamlets, enabling high system-level current density, and the modular "stacking" of MEMS acceleration stages to enable high beam energy.…”
Section: California Institute Of Technology/los Alamos National Lab: ...mentioning
confidence: 96%