Multi-color imaging with silicon-on-insulator diode uncooled infrared focal plane array using through-hole plasmonic metamaterial absorbers

Fujisawa, Daisuke; Ogawa, Shinpei; Hata, Hiroyuki; Uetsuki, Mitsuharu; Misaki, Koji; Takagawa, Yousuke; Kimata, Masafumi

doi:10.1109/memsys.2015.7051106

Cited by 13 publications

(10 citation statements)

References 11 publications

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“…The through-holes did significantly reduce the absorber volume of the pixels, which leads to fast response and provides an advantage for surface micromachining techniques, such as under etching of the absorber area. 30 …”

Section: Effect Of Through-holesmentioning

confidence: 99%

Theoretical investigation of all-metal-based mushroom plasmonic metamaterial absorbers at infrared wavelengths

2015

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Abstract. High-performance wavelength-selective infrared (IR) sensors require small pixel structures, a lowthermal mass, and operation in the middle-wavelength infrared (MWIR) and long-wavelength infrared (LWIR) regions for multicolor IR imaging. All-metal-based mushroom plasmonic metamaterial absorbers (MPMAs) were investigated theoretically and were designed to enhance the performance of wavelength-selective uncooled IR sensors. All components of the MPMAs are based on thin layers of metals such as Au without oxide insulators for increased absorption. The absorption properties of the MPMAs were investigated by rigorous coupled-wave analysis. Strong wavelength-selective absorption is realized over a wide range of MWIR and LWIR wavelengths by the plasmonic resonance of the micropatch and the narrow-gap resonance, without disturbance from the intrinsic absorption of oxide insulators. The absorption wavelength is defined mainly by the micropatch size and is longer than its period. The metal post width has less impact on the absorption properties and can maintain single-mode operation. Through-holes can be formed on the plate area to reduce the thermal mass. A small pixel size with reduced thermal mass and wideband single-mode operation can be realized using all-metal-based MPMAs.

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Section: Effect Of Through-holesmentioning

confidence: 99%

Theoretical investigation of all-metal-based mushroom plasmonic metamaterial absorbers at infrared wavelengths

2015

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“…Plasmonic metamaterial absorbers are structurally scalable, which enables a wide range of applications at various wavelengths, including solar cells in the visible range [6], biological sensors in the near infrared (IR) [7] and middle IR [8], and thermal sensors in the IR [9][10][11][12] and terahertz ranges [13,14], as well as EW shielding [15] and wireless microwave transfer [16]. Wavelength-selective IR absorbers show significant promise as advanced uncooled IR sensors since they allow the identification of objects through their radiation spectra [17], and many applications of these devices are anticipated, such as in gas analysis, fire detection, multi-color imaging [18], and hazardous materials recognition [19]. Metal-insulator-metal (MIM)-type absorbers [20,21] are important candidates for wavelength-selective uncooled IR sensors due to their small thermal mass and size.…”

Section: Introductionmentioning

confidence: 99%

Absorption Properties of Simply Fabricated All-Metal Mushroom Plasmonic Metamaterials Incorporating Tube-Shaped Posts for Multi-Color Uncooled Infrared Image Sensor Applications

et al. 2016

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Wavelength-selective infrared (IR) absorbers have attracted considerable interest due to their potential for a wide range of applications. In particular, they can be employed as advanced uncooled IR sensors that identify objects through their radiation spectra. Herein, we propose a mushroom plasmonic metamaterial absorber incorporating tube-shaped metal posts (MPMAT) for use in the long-wavelength IR (LWIR) region. The MPMAT design consists of a periodic array of thin metal micropatches connected to a thin metal plate via tube-shaped metal posts. Both the micropatches and posts can be constructed simultaneously as a result of the tube-shaped structure of the metal post structure; thus, the fabrication procedure is both simple and low cost. The absorption properties of these MPMATs were assessed both theoretically and experimentally, and the results of both investigations demonstrated that these devices exhibit suitable levels of LWIR absorption regardless of the specific tube-shaped structures employed. It was also found to be possible to tune the absorption wavelength by varying the micropatch width and the inner diameter of the tube-shaped metal posts, and to obtain absorbance values of over 90%. Focal plane array structures based on such MPMATs could potentially serve as high-performance, low-cost, multi-spectral uncooled IR image sensors.

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“…8 Additional optical attachments such as filters lead to complicated systems, which in turn leads to higher costs and a degeneration of the wavelength selectivity because the filters themselves emit IR radiation. Our group has developed advanced functional uncooled IR sensors with wavelength selectivity, 9,10 multicolor imaging, 11 or polarization selectivity 12,13 using plasmonics 14,15 and metamaterials 16,17 technologies to address this challenge and expand the potential applications. Absorbers that employ plasmonic and metamaterials have the advantage of enabling control over the absorption wavelength simply by varying the surface structural design.…”

Section: Introductionmentioning

confidence: 99%

Fano resonance in asymmetric-period two-dimensional plasmonic absorbers for dual-band uncooled infrared sensors

2016

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, "Fano resonance in asymmetric-period twodimensional plasmonic absorbers for dual-band uncooled infrared sensors," Opt. Eng. 55 (11) Abstract. The spectral discrimination function of uncooled infrared (IR) sensors has significant advantages for applications such as fire detection, gas analysis, and biological analysis. We have previously demonstrated wavelength-selective uncooled IR sensors using two-dimensional plasmonic absorbers (2-D PLAs) over a wide range spanning the middle-and long-wavelength IR regions. 2-D PLAs are highly promising in terms of practical application due to the ease of fabrication and robustness for structural fluctuations. However, dual-band operation based on this concept has not yet been investigated, even though the ability to absorb in two different wavelength bands is extremely important for object recognition. Thus, a dual-band uncooled IR sensor was developed that employs Fano resonance in the plasmonic structures. To achieve dual-band detection, asymmetric periods in the orthogonal x -and y -directions were introduced into 2-D PLAs. Theoretical investigations predicted an asymmetric absorbance line shape dependent on the polarization attributed to Fano resonance. The spectral responsivity of the developed sensor demonstrated that selective detection occurred in two different wavelength bands due to polarization-dependent Fano resonance. The results obtained in this study will be applicable to the development of advanced sensors capable of multiband detection in the IR region.

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Multi-color imaging with silicon-on-insulator diode uncooled infrared focal plane array using through-hole plasmonic metamaterial absorbers

Cited by 13 publications

References 11 publications

Theoretical investigation of all-metal-based mushroom plasmonic metamaterial absorbers at infrared wavelengths

Theoretical investigation of all-metal-based mushroom plasmonic metamaterial absorbers at infrared wavelengths

Absorption Properties of Simply Fabricated All-Metal Mushroom Plasmonic Metamaterials Incorporating Tube-Shaped Posts for Multi-Color Uncooled Infrared Image Sensor Applications

Fano resonance in asymmetric-period two-dimensional plasmonic absorbers for dual-band uncooled infrared sensors

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