Multi-component (Al,Cr,Nb,Y,Zr)N thin films by reactive magnetron sputter deposition for increased hardness and corrosion resistance

Fieandt, Kristina von; Paschalidou, Eirini‐Maria; Srinath, Aishwarya; Souček, Pavel; Riekehr, Lars; Nyholm, Leif; Lewin, Erik

doi:10.1016/j.tsf.2019.137685

Cited by 50 publications

(27 citation statements)

References 72 publications

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“…The formation of nitride solid-solution could be attributed to the high entropy effect, which by increasing solubility, limits the formation of intermetallic phases between nitrogen and metallic elements [9]. Similar nitride phases were found in other HEN coatings [8,9,14]. Besides the main phase, some small peaks of fcc phases with slightly different lattice parameters are also present.…”

Section: Crystallographic Structurementioning

confidence: 56%

“…The first publication dealing with a reactive magnetron sputtering deposition of nitrides from the Al-Cr-Ta-Ti-Zr system already showed high hardness and elastic modulus, 32 and 368 GPa, respectively [7]. Later studies confirmed the very high mechanical resistance of other HENs, often reaching hardness values above 25 GPa [8][9][10]. Most HENs consist of a single phase of multielement NaCl-type face-centered cubic structure [11].…”

Section: Introductionmentioning

confidence: 99%

“…The formation of a single solid solution phase confirms the presence of a high entropy effect in this group of materials. Moreover, HENs reveal other promising properties such as good corrosion resistance [8,10], good oxidation resistance [12], promising tribological properties (low friction coefficient and high wear resistance) [9]. The properties mentioned above make HENs very good candidates for high resistant protective coatings in many industrial applications.…”

Section: Introductionmentioning

confidence: 99%

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MAGNETRON SPUTTERING DEPOSITION OF HIGH ENTROPY NITRIDES FROM ChRomium-HaFnium-MOlybdenum-TAntalum-Wolfram SYSTEM

Stasiak

Souček

Buršı́ková

et al. 2021

NANOCON 2021 Conference Proeedings

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High entropy alloys (HEAs) are multicomponent materials with at least five elements close to the equiatomic ratio. The multielement composition leads to many effects that stabilize solid solution phases instead of intermetallic compounds. It results in promising mechanical properties, high thermal stability, good corrosion resistance, etc. After the discovery of HEAs in 2004, the concept only concerned metallic materials. Later, the idea was extended to high entropy ceramics (carbides, nitrides, oxides). In this study, the high entropy nitrides (HENs) from the Cr-Hf-Mo-Ta-W system were deposited by magnetron sputtering from elemental segmented targets. Two series of samples were deposited under different nitrogen flow from 0 sccm to 20 sccm at ambient temperature and 700 °C. The coatings deposited at low nitrogen flow consist predominantly of metallic and amorphous phases. At higher nitrogen flow (above 10 sccm), the coatings mainly consist of multielement facecentered cubic nitride with nanometric grain size, which lattice parameter increases with increasing nitrogen content. The chemical composition of films varies as a function of nitrogen flow and temperature. With increasing nitrogen flow and temperature, the deposition rate decreases from 67 nm min -1 at ambient temperature with no nitrogen to 38 nm min -1 at 700 °C under 20 sccm nitrogen flow. The coatings revealed high hardness up to 26.6 GPa and Young's modulus up to 531 GPa.

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Section: Crystallographic Structurementioning

confidence: 56%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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MAGNETRON SPUTTERING DEPOSITION OF HIGH ENTROPY NITRIDES FROM ChRomium-HaFnium-MOlybdenum-TAntalum-Wolfram SYSTEM

Stasiak

Souček

Buršı́ková

et al. 2021

NANOCON 2021 Conference Proeedings

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show abstract

“…In the past decades, the deposition of thin films has been a strategic alternative to provide improved surface properties. The development of protective layers on metallic substrates has enabled good wear resistance, [1][2][3][4][5][6][7][8][9][10] corrosion protection, [11][12][13][14][15][16][17][18][19][20][21][22][23][24] enhanced surface hardness, [25][26][27][28][29][30][31][32][33][34] and superior biocompatibility. [18,20,[35][36][37][38][39][40] Plasma deposition procedure is a promising technique that can be used to supply thin films, aiming at applications such as magnetron sputtering, [2,3,6,10,12,18,…”

Section: Introductionmentioning

confidence: 99%

“…In the past decades, the deposition of thin films has been a strategic alternative to provide improved surface properties. The development of protective layers on metallic substrates has enabled good wear resistance, [ 1–10 ] corrosion protection, [ 11–24 ] enhanced surface hardness, [ 25–34 ] and superior biocompatibility. [ 18,20,35–40 ]…”

Section: Introductionmentioning

confidence: 99%

Evaluation of Corrosion Resistance of Thin Films Formed on AISI 316L Steel by Plasma Using Hastelloy as Cathodic Cage

Monção

Júnior

Bandeira

et al. 2021

Physica Status Solidi (a)

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Herein, the use of Hastelloy C-276 as a cathodic cage for the deposition of thin films on the AISI 316L steel substrate by plasma is investigated. The films are processed through floating potential at 350, 375, 400, and 425 C for 4 h, using a hydrogen-nitrogen mixture in the proportion of 40% and 60%, respectively. The thin films are investigated by X-ray diffraction, scanning electron microscopy, Raman spectroscopy, and potentiodynamic polarization. The spectroscopy results point out the formation of different phases such as FeNi 3 , CrNi, and MoN 1/2 . Films acquired at 375 ºC present superior corrosion resistance with less negative corrosion potential (À0.020 V). The increase and decrease in FeNi 3 and CrNi contents follow the improvement of the applied temperature, which is unbeneficial to the corrosion resistance of the films.

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Powder Metallurgy Route for the Synthesis of Multiprincipal Element Alloys Sputtering Targets

et al. 2022

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With the advent of high-entropy alloys (HEAs) in the early 2000s, [1,2] the research activities in the branch of physical metallurgy gained new momentum as witnessed by the huge amount of papers produced on these materials. [3][4][5] The specific term was coined by Yeh and co-workers who attributed the stabilization of simple solid solution phases, often observed in these systems, to high configurational entropy. [2] Restrictions were set on both number of principal elements (≥5) and their concentrations (5-35 at%). [2] In a recent review, Miracle and Senkov suggested to use the broader terms multiprincipal element alloys (MPEAs), complex concentration alloys (CCAs), and baseless alloys (BAs) in order to better conceptualize the immense design space offered by nonconventional alloys without putting limits on composition and microstructure. [4] The 3d transition metal family of MPEAs is by far the most studied one and it can be compared to stainless steels and superalloys. [4] This family contains at least four of the elements Al, Co, Cr, Cu, Fe, Mn, Ni, Ti, and V. [4] Common 4-element branches of this popular alloy family are FeNiCrCo and FeNiCrMn. Being comparable to commercial structural materials, much work has been focused on mechanical properties and their relations to composition and microstructure. In particular, the distinct roles played by Al, Sn, and Nb have been evidenced. [4] Another important area of study is the environmental resistance of structural materials in terms of, e.g., corrosion and wear resistance. [4]

show abstract

Multi-component (Al,Cr,Nb,Y,Zr)N thin films by reactive magnetron sputter deposition for increased hardness and corrosion resistance

Cited by 50 publications

References 72 publications

MAGNETRON SPUTTERING DEPOSITION OF HIGH ENTROPY NITRIDES FROM ChRomium-HaFnium-MOlybdenum-TAntalum-Wolfram SYSTEM

MAGNETRON SPUTTERING DEPOSITION OF HIGH ENTROPY NITRIDES FROM ChRomium-HaFnium-MOlybdenum-TAntalum-Wolfram SYSTEM

Evaluation of Corrosion Resistance of Thin Films Formed on AISI 316L Steel by Plasma Using Hastelloy as Cathodic Cage

Powder Metallurgy Route for the Synthesis of Multiprincipal Element Alloys Sputtering Targets

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