Multi-degree-of-freedom motion error measurement in an ultraprecision machine using laser encoder — Review

Lee, ChaBum; Lee, Sun-Kyu

doi:10.1007/s12206-012-1217-6

Cited by 40 publications

(23 citation statements)

References 64 publications

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“…Precision metrology is still playing an important role in precision on-machine measurement, positioning and manufacturing from the point of a wide range of measurements with high accuracy and resolution [1]- [8].…”

Section: Introductionmentioning

confidence: 99%

“…In accordance with the increasing market demand for ultra-precision technology, a high precision multi-degree-of-freedom displacement measurement technology has become important for industrial applications such as the field of manufacturing and inspection because physical quantities, such as linear and angular displacements, are key parameters for keeping and improving quality control of a production system [1], [2], [5]- [8].…”

Section: Introductionmentioning

confidence: 99%

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An Approach of Electronic Subdividing Method for Measuring Straightness and Displacement of a Precision Linear Stage Simultaneously

Tsai

Chen

2016

MATEC Web Conf.

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Abstract. Optical encoders are commonly used in modern positioning systems. The accuracy and resolution of the optical encoders are always restricted by generated sinusoidal signals and the assembly technique. In this study, an electronic signal subdividing system is developed. This system is based on FPGA in combination with A/D and D/A converting circuits. Subdividing algorithm improves the segmenting signal amplitude method. Furthermore, we also construct a laser encoder for measuring straightness error and displacement of a linear stage simultaneously. The laser encoder consisting of the stainless steel bar and the sensor are developed for two-axis (X-and Z-axis) position measurement. The two dimensional sinusoidal array on the stainless steel bar are machined by ultrasonic elliptical vibration cutting system. The stainless steel bar has a three dimensional micro-structured surface, which is a superposition of periodic sinusoidal waves in the X-and Z-directions with spatial wavelengths of 350 m and amplitudes of 0.5 m. The laser-based two-axis position sensor is used to detect local slope profiles of the grid surface, and the displacement and straightness error could be extracted from the X-and Z-axis sensing signal. The sensing signal is processed by FPGA subdividing system. In addition, the proposed subdividing method is verified by the performances and effects of measuring results.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

An Approach of Electronic Subdividing Method for Measuring Straightness and Displacement of a Precision Linear Stage Simultaneously

Tsai

Chen

2016

MATEC Web Conf.

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“…Thanks to current manufacturing technology such as E-Beam lithography, photolithography, and holography, fabrication of grating structures can be achieved up to nanometer accuracy, which means that fabrication error can be assumed to be negligible. However, diffraction characteristics of the TIR-based grating structures are highly sensitive to those geometric properties, pitch, filling factor, and depth, that the proper design methods to be able to solve global numerical optimization problems with continuous variables have been becoming issues for many optical applications [5][6][7][8]. Here the optical analysis method was combined with the hybrid optimization methods to evaluate the performance of the TIR-based grating structure and find out the optimal set of design parameters at the same time.…”

Section: Introductionmentioning

confidence: 99%

“…Scalar diffraction theory is one of the widely used methods for the design and analysis of grating structures [7][8][9][10]. The Fresnel and Fraunhofer diffraction integrals are 2 Advances in Optical Technologies commonly adopted, and these signals are generally evaluated with the fast Fourier transform (FFT).…”

Section: Introductionmentioning

confidence: 99%

“…Whereas the angular and spectral characteristics of gratings solely depend on (1), DE is dependent on the surface profile of gratings, which is calculated by the rigorous coupled-wave analysis (RCWA) [7][8][9][10][11]. In accordance with the TIR-based grating condition, it might be a big obstacle to obtain the optimum grating parameters, , , and .…”

Section: Introductionmentioning

confidence: 99%

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Total Internal Reflection-Based High Efficiency Grating Design for a Metal-Free Polarizing Filter Applications Using Hybrid Optimization Procedure

Lee

2014

Advances in Optical Technologies

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This paper presents a fast and rigorous design method for grating-based metal-free polarizing filter applications using two-step hybrid optimization techniques. Grating structures utilizing the total internal reflection in a lamellar configuration were used to achieve metal-free solution, which is a key technology in the chirped pulse amplification for high power laser system. Here two polarizing filters were designed: polarization sensitive and polarization insensitive. Those polarization performances were characterized by the rigorous coupled-wave analysis (RCWA), and the design parameters of grating structures, pitch, depth, and filling factor were optimized by two-step hybrid optimization procedure because the diffraction characteristics of grating-based polarizing filters are highly sensitive to small changes in design parameters. The Taguchi method is incorporated into selection process in the genetic algorithm, which indicates that the Taguchi method optimizes the design parameters in a coarse manner, and then, coarsely optimized parameters are finely optimized using the genetic algorithm. Therefore the proposed method could solve global numerical optimization problems with continuous variables. The proposed two-step hybrid optimization algorithm could effectively optimize the grating structures for the purpose of polarization filter applications, and the optimized grating structures could selectively filter the incident light up to 99.8% as to TE or TM waves.

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Long-Range Nano-Scanning Devices Based on Optical Sensing Technology

Lee

2016

Advanced Mechatronics and MEMS Devices II

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Multi-degree-of-freedom motion error measurement in an ultraprecision machine using laser encoder — Review

Cited by 40 publications

References 64 publications

An Approach of Electronic Subdividing Method for Measuring Straightness and Displacement of a Precision Linear Stage Simultaneously

An Approach of Electronic Subdividing Method for Measuring Straightness and Displacement of a Precision Linear Stage Simultaneously

Total Internal Reflection-Based High Efficiency Grating Design for a Metal-Free Polarizing Filter Applications Using Hybrid Optimization Procedure

Long-Range Nano-Scanning Devices Based on Optical Sensing Technology

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