2021
DOI: 10.1088/1361-6595/ac2222
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Multi-diagnostic experimental validation of 1d3v PIC/MCC simulations of low pressure capacitive RF plasmas operated in argon

Abstract: The particle-in-cell/Monte Carlo collisions (PIC/MCC) simulation approach has become a standard and well-established tool in studies of capacitively coupled radio frequency (RF) plasmas. While code-to-code benchmarks have been performed in some cases, systematic experimental validations of such simulations are rare. In this work, a multi-diagnostic experimental validation of 1d3v electrostatic PIC/MCC simulation results is performed in argon gas at pressures ranging from 1 Pa to 100 Pa and at RF (13.56 MHz) vo… Show more

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Cited by 37 publications
(55 citation statements)
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“…The latter was limited to 30 W (driving voltage amplitude ~400 V) to avoid increased heat load within the reactor, whereby the gas temperature remains cold. [ 44 ] To optimize pressure, the luminosity distribution above the RF electrode was optically observed showing wider plasma zones, that is, increasing sheath width and plasma length, with reducing pressure (Figure 2). The luminosity indicates the formation of excited species in the plasma, which becomes increasingly asymmetric at higher pressure due to collisions.…”
Section: Resultsmentioning
confidence: 99%
“…The latter was limited to 30 W (driving voltage amplitude ~400 V) to avoid increased heat load within the reactor, whereby the gas temperature remains cold. [ 44 ] To optimize pressure, the luminosity distribution above the RF electrode was optically observed showing wider plasma zones, that is, increasing sheath width and plasma length, with reducing pressure (Figure 2). The luminosity indicates the formation of excited species in the plasma, which becomes increasingly asymmetric at higher pressure due to collisions.…”
Section: Resultsmentioning
confidence: 99%
“…At the electrode surfaces, electrons are elastically reflected with a probability of η e = 0.7. This value is adopted based on the findings of Schulenberg et al [53]. For O + 2 ions, a SEE coefficient of 0.015 is considered, while for Ne + ions the SEE coefficient is set to 0.1 [72].…”
Section: Surface Processesmentioning
confidence: 99%
“…Tunable diode laser absorption spectroscopy (TDLAS) measurements were performed in pure Ar discharges in the same experimental system. The details of this technique are described in [53]. The measured gas temperature was then compared with PIC/MCC results obtained for different values of the (L e /k + 1/h) coefficient, and its value giving the best agreement was determined and used throughout this study.…”
Section: Gas Heatingmentioning
confidence: 99%
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“…54) In addition, neutral particles are assumed to be uniform in the discharge region throughout the simulation with a Maxwellian velocity distribution at a gas temperature of 300 K. The typical value used for the ion-induced secondary electron emission coefficient (SEEC) is γ ⩽ 0.1 for clean metallic electrodes. 33,55,56) At p = 10 mTorr and γ = 0.1, the plasma density is increased by about 10% although the IEDF and IADF are almost unchanged. The effect of the secondary electron emission coefficients is small at low pressure.…”
mentioning
confidence: 99%