Multi-dimensional modelling of plasma—solid interaction

Abstract

The understanding of processes in the boundary layer between plasma and immersed substrates is important in probe diagnostics of plasmas as well as in plasma-chemical technologies. In both cases the standard one-dimensional particle codes are not sufficient for the description of complete processes. This contribution is devoted to the analysis of performance of computer codes prepared for the study of plasma-solid interaction in low-temperature plasma in more dimensions and at low and medium pressures. Besides the standard PIC-MC technique and fluid modelling the more aclvanced methods were used --solvers of Poisson equation based on Fast Fourier Transform and evolutionary modelling. PACS: 52.65.-y, 52.40.Kh